I-Tantalum carbide (i-TaC) iingubo ezinobunyulu obuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokuchasana kweekhemikhali

Inkcazelo emfutshane:

Ukwaleka kwe-TaC sisizukulwana esitsha sezinto ezixhathisa ubushushu obuphezulu, ezinozinzo olungcono lobushushu obuphezulu kuneSiC, njengengubo ekwaziyo ukumelana ne-corrosion, i-oxidation resistant coating, ukunxiba ukugquma okuxhathisayo, kunokusetyenziswa kwindawo engaphezulu kwe-2000℃, esetyenziswa ngokubanzi kwi-aerospace ultra- ubushushu obuphezulu iindawo ezishushu ekupheleni, isizukulwana sesithathu semiconductor enye crystal ukukhula kunye namanye amasimi.


Iinkcukacha zeMveliso

Iithegi zeMveliso

I-Semicera Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.I-Semicera Semicera ehamba phambili yenkqubo yokugqoka yenza i-tantalum carbide (i-TaC) ikwazi ukufezekisa ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor.Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera Semicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.

Emva kweminyaka yophuhliso, iSemicera yoyisile iteknoloji yeCVD TaCngeenzame ezidibeneyo zesebe leR&D.Iziphene kulula ukwenzeka kwinkqubo yokukhula kwee-wafers ze-SiC, kodwa emva kokusetyenziswaI-TaC, umahluko ubalulekile.Apha ngezantsi luthelekiso lweewafers ezine-TaC nangaphandle kwayo, kunye namalungu kaSimiera okukhula kwekristale enye.

微信图片_20240227150045

kunye nangaphandle kwe-TaC

微信图片_20240227150053

Emva kokusebenzisa i-TaC (ekunene)

Ukongeza, ubomi benkonzo yeemveliso zokugquma ze-TaC zeSemicera bude kwaye buxhathisa ngakumbi kubushushu obuphezulu kunobo bokwaleka kwe-SiC.Emva kwexesha elide ledatha yomlinganiselo waselabhoratri, i-TaC yethu ingasebenza ixesha elide kubuninzi obungama-2300 degrees celcius.Ezi zilandelayo zezinye zeesampulu zethu:

微信截图_20240227145010

(a) Idayagram ecwangcisiweyo yesixhobo sokukhulisa i-SiC enye crystal ingot ngendlela ye-PVT (b) Isibiyeli sembewu egqunywe yi-TaC ePhezulu (kubandakanywa nembewu ye-SiC) (c) iringi ye-TAC egqunywe ngegraphite

ZDFVzCFV
Uphawu oluphambili
Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
Inkonzo yethu

  • Ngaphambili:
  • Okulandelayo: