Abathwali be-SiC yokwambathisa kwi-semiconductor etching

Inkcazelo emfutshane:

I-Semicera Semiconductor Technology Co., Ltd. ngumboneleli ohamba phambili weeseramics zesemiconductor eziphambili. Iimveliso zethu eziphambili ziquka: ii-silicon carbide etched discs, ii-silicon carbide boat trailers, ii-silicon carbide wafer ships (PV & Semiconductor), iityhubhu ze-silicon carbide furnace, i-silicon carbide cantilever paddles, i-silicon carbide chuck, i-silicon carbide beams, kunye ne-CVD coating kunye ne-SiC. Iingubo ze-TaC.

Iimveliso zisetyenziswa kakhulu kwi-semiconductor kunye namashishini e-photovoltaic, afana nokukhula kwekristale, i-epitaxy, i-etching, ukupakishwa, ukugubungela kunye nezixhobo zokushisa ezivuthayo.

 

 


Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkcazo

Inkampani yethu ibonelela ngeenkonzo zenkqubo yokugquma kwe-SiC ngendlela ye-CVD kumphezulu wegraphite, iikeramics kunye nezinye izinto, ukwenzela ukuba iigesi ezikhethekileyo ezinekhabhoni kunye nesilicon zisabela kubushushu obuphezulu ukuze zifumane ubunyulu obuphezulu beamolekyuli zeSiC, iimolekyuli ezifakwe kumphezulu wezinto ezigqunyiweyo, ukwenza umaleko okhuselayo we-SIC.

Iimpawu eziphambili

1. Ukumelana nobushushu obuphezulu be-oxidation:
Ukumelana ne-oxidation kusekuhle kakhulu xa ubushushu buphezulu ukuya kuma-1600 C.
2. Ukucoceka okuphezulu : yenziwe yi-chemical vapor deposition phantsi kwemeko yokushisa kwe-chlorination ephezulu.
3. Ukumelana nokhukuliseko: ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
4. Ukumelana nokubola: i-asidi, i-alkali, ityuwa kunye nee-reagents eziphilayo.

IiNgcaciso eziphambili ze-CVD-SIC Coating

Iipropati zeSiC-CVD

Ulwakhiwo lweCrystal FCC isigaba β
Ukuxinana g/cm ³ 3.21
Ukuqina Vickers ubulukhuni 2500
Ubungakanani benkozo μm 2~10
Ucoceko lweMichiza % 99.99995
Ubushushu Umthamo J·kg-1 ·K-1 640
Ubushushu bokunciphisa 2700
Amandla eFelexural MPa (RT 4-point) 415
Imodulus eselula I-Gpa (4pt bend, 1300℃) 430
Ukwandiswa kweThermal (CTE) 10-6K-1 4.5
I-Thermal conductivity (W/mK) 300
Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
Inkonzo yethu

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