I-SiC ifakwe kwi-UV ye-UV ye-UV ye-LED-iCandelo le-MOCVD eliPhezulu le-Epitaxy yokuSebenza okuPhezulu
Isishwankathelo:I-SiC Coated Deep UV LED Susceptor iyingxenye ebalulekileyo kwiinkqubo ze-MOCVD (i-Metal-Organic Chemical Vapor Deposition), eyenzelwe ngokukodwa ukuxhasa ngokufanelekileyo kunye nokuzinza okunzulu kwe-UV LED epitaxial layer ukukhula. KwaSemicera, singumenzi ophambili kunye nomthengisi we-SiC coated susceptors, enikezela ngeemveliso ezihlangabezana neyona migangatho iphezulu yoshishino. Ngeminyaka yamava kunye nobudlelwane bexesha elide kunye nabavelisi abaphezulu be-LED epitaxial, izisombululo zethu ze-susceptor zithenjwa kwihlabathi liphela.
Iimpawu eziphambili kunye neeNzuzo:
▪Ilungiselelwe ubuNzulu be-UV LED Epitaxy:Ilungiselelwe ngokukodwa ukukhula kwe-epitaxial ephezulu yokusebenza kwee-LED ezinzulu ze-UV, kubandakanywa nezo zikwi <260nm ububanzi be-wavelength (esetyenziswa kwi-UV-C yokubulala iintsholongwane, inzala, kunye nezinye izicelo).
▪Izinto kunye noKwaleka:Yenziwe ngegraphite ekumgangatho ophezulu we-SGL, eqatywe ngeCVD SiC, ukuqinisekisa ukuxhathisa okugqwesileyo kwi-NH3, i-HCl, kunye neendawo ezinobushushu obuphezulu. Le ngubo ehlala ixesha elide iphakamisa ukusebenza kunye nokuphila ixesha elide.
▪Ulawulo lweThermal oluchanekileyo:Ubuchule bokuqhubekela phambili buqinisekisa ukuhanjiswa kobushushu obufanayo, ukuthintela ukuthambeka kobushushu obunokuthi kube nefuthe lokukhula kwe-epitaxial layer, ukuphucula ukufana, kunye nomgangatho wezinto eziphathekayo.
▪ Ukuhambelana koKwandiswa kweThermal:Idibanisa i-coefficient yokwandiswa kwe-thermal ye-AlN/GaN epitaxial wafers, ukunciphisa umngcipheko wokulwa okanye ukuqhekeka ngexeshaMOCVDinkqubo.
Ukulungelelaniswa neSixhobo esiKhokeleyo se-MOCVD: Iyahambelana neenkqubo eziphambili ze-MOCVD ezifana neVeeco K465i, EPIK 700, kunye ne-Aixtron Crius, ezixhasa ubungakanani be-wafer ukusuka kwi-2 ukuya kwii-intshi ze-8 kwaye zinika izisombululo ezilungiselelwe ukucwangciswa kwe-slot, ubushushu benkqubo, kunye nezinye iiparamitha.
Usetyenziso:
▪ Ukwenziwa kwe-LED ye-UV enzulu:Ilungele i-epitaxy yee-LED ezinzulu ze-UV ezisetyenziswa kwizicelo ezinje ngokubulala iintsholongwane kwi-UV-C kunye nokuvala inzala.
▪ Nitride Semiconductor Epitaxy:Ifanelekile kwiinkqubo ze-GaN kunye ne-AlN epitaxial kwimveliso yesixhobo se-semiconductor.
▪ UPhando noPhuhliso:Ukuxhasa imifuniselo ephambili ye-epitaxy kwiiyunivesithi kunye namaziko ophando agxile kwizinto ezinzulu ze-UV kunye nobuchwepheshe obutsha.
Kutheni ukhetha iSemicera?
▪ Umgangatho ongqiniweyo:YethuSiC coatedIzixhobo ezinzulu ze-UV ze-LED zivavanywa ngokungqongqo ukuqinisekisa ukuba ziyahambelana nokusebenza kwabavelisi abaphezulu bamazwe ngamazwe.
▪ Izisombululo ezilungiselelweyo:Sinikezela ngeemveliso ezilungelelanisiweyo ukuhlangabezana neemfuno ezizodwa zabathengi bethu, ukuqinisekisa ukusebenza kakuhle kunye nokuthembeka kwexesha elide.
▪ UbuGcisa behlabathi:Njengeqabane elithembekileyo labaninziI-LED epitaxialabavelisi kwihlabathi liphela, iSemicera izisa itekhnoloji ephucukileyo kunye nobutyebi bamava kuyo yonke iprojekthi.
Qhagamshelana nathi Namhlanje! Fumanisa ukuba iSemicera inokuxhasa njani iinkqubo zakho ze-MOCVD kumgangatho ophakamileyo, othembekileyo we-SiC egqunywe ubunzulu be-UV LED susceptors. Qhagamshelana nathi ngolwazi oluthe kratya okanye ucele ikowuti.
