Ubunyulu obuphezulu be-tantalum carbide yokwenza ngokwezifiso imveliso

Inkcazelo emfutshane:

Ukwaleka kwe-TaC sisizukulwana esitsha sezinto ezixhathisa ubushushu obuphezulu, ezinozinzo olungcono lobushushu obuphezulu kuneSiC, njengengubo ekwaziyo ukumelana ne-corrosion, i-oxidation resistant coating, ukunxiba ukugquma okuxhathisayo, kunokusetyenziswa kwindawo engaphezulu kwe-2000℃, esetyenziswa ngokubanzi kwi-aerospace ultra- ubushushu obuphezulu iindawo ezishushu ekupheleni, isizukulwana sesithathu semiconductor enye crystal ukukhula kunye namanye amasimi.

 

 

 


Iinkcukacha zeMveliso

Iithegi zeMveliso

I-Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.I-Semicera Semicera ehamba phambili yenkqubo yokugqoka yenza i-tantalum carbide (i-TaC) ikwazi ukufezekisa ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor. Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.

 

Emva kweminyaka yophuhliso, iSemicera yoyisile iteknoloji yeCVD TaCngeenzame ezidibeneyo zesebe leR&D. Iziphene kulula ukwenzeka kwinkqubo yokukhula kwee-wafers ze-SiC, kodwa emva kokusetyenziswaI-TaC, umahluko ubalulekile. Apha ngezantsi luthelekiso lweewafers ezine-TaC nangaphandle kwayo, kunye neendawo zeSemicera zokukhula kwekristale enye.

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kunye nangaphandle kwe-TaC

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Emva kokusebenzisa i-TaC (ekunene)

Ukongeza, ubomi benkonzo yeemveliso zokugquma ze-TaC zeSemicera bude kwaye buxhathisa ngakumbi kubushushu obuphezulu kunobo bokwaleka kwe-SiC. Emva kwexesha elide ledatha yomlinganiselo waselabhoratri, i-TaC yethu ingasebenza ixesha elide kubuninzi obungama-2300 degrees celcius. Ezi zilandelayo zezinye zeesampulu zethu:

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(a) Idayagram ecwangcisiweyo yesixhobo sokukhulisa i-SiC enye crystal ingot ngendlela ye-PVT (b) Isibiyeli sembewu egqunywe yi-TaC ePhezulu (kubandakanywa nembewu ye-SiC) (c) iringi ye-TAC egqunywe ngegraphite

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Uphawu oluphambili
Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
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