6” Isithwali seWafer se-Aixtron G5

Inkcazelo emfutshane:

ISemicera's Aixtron G5 6″ isithwali se-wafer yinxalenye yobunjineli obuchanekileyo eyenzelwe ukufezekisa ukusebenza kakuhle kwiinkqubo zokukhula kwe-epitaxial. Eyakhelwe ngokukodwa inkqubo ye-Aixtron ye-G5, umphathiswa uqinisekisa ukuzinza okugqwesileyo kunye nokuphathwa kwe-wafer efanayo ngexesha leenkqubo zokushisa okuphezulu. Ngezixhobo eziphambili zeSemicera kunye nobuchule, lo mphathi we-wafer uphucula ukusebenza kakuhle kunye nokuthembeka kwemveliso ye-semiconductor, iyenza ibe sisixhobo esibalulekileyo kumashishini afuna inkxaso ye-wafer echanekileyo kunye nokuphathwa. Sijonge phambili ekubeni liqabane lakho lexesha elide eTshayina.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-6 '' I-Wafer Carrier ye-Aixtron G5 yi-Semicera yenzelwe ukuhlangabezana neemfuno ezifunekayo zeenkqubo zokukhula kwe-epitaxial kwiinkqubo ze-Aixtron G5. Yakhiwe ngegraphite ekumgangatho ophezulu, okuumthwali we-waferiqinisekisa uzinzo kunye nokufana ngexeshaCVDkwayeIinkqubo ze-MOCVD, eyenza ukubekwa okuchanekileyo kwi-epi reactor.

Ngei-silicon carbide ceramici-coating, i-6 '' i-Wafer Carrier ye-Aixtron G5 inika ukuqina okuphuculweyo kunye nokumelana nobushushu, iyenza ilungele ukusetyenziswa kobushushu obuphezulu ekukhuleni kwe-epitaxial. Le mveliso yenzelwe ukuxhasa ngokufanelekileyoiqhekezana lesonkaukuphatha kunye nokwandisa ukusebenza kwimveliso ye-semiconductor.

Kwi-Semicera, sigxile ekuboneleleni ngezisombululo eziphezulu kwishishini le-semiconductor. Abathwali bethu be-wafer bakhelwe ukuthembeka, ukuqinisekisa ukusebenza kakuhle kwiinkqubo ze-Aixtron G5 kunye nezinye.CVD epitaxyii-reactors. Nokuba usebenza nge-silicon carbide okanye ezinye izinto, esi sithwali se-wafer siqinisekisa ukuchaneka kunye nokungaguquguquki okufunekayo kwimveliso ye-semiconductor ephezulu.

Ezona mpawu:

• Ilungiselelwe iinkqubo ze-Aixtron G5 kunye nezinye i-CVD MOCVD reactors.
• Isixhasi segraphite esikumgangatho ophezulu esine-silicon carbide yokwambathisa eludongeni ukwenzela ukuqina okwandisiweyo.
• Ilungele iinkqubo zokukhula kwe-epitaxial ezifuna ukuchaneka kunye nokuzinza kwe-thermal.
• Ukuphathwa kwe-wafer okuthembekileyo kwiindawo eziyinkimbinkimbi ze-semiconductor.

I-Semicera izinikele ekuboneleleni izisombululo ezinqamlekileyo, ukuqinisekisa ukuba yonke i-6 '' i-Wafer Carrier ihlangabezana nemigangatho ephezulu kwiimfuno zakho ze-epitaxy.