Iingubo zeTantalum carbide (TaC) ezinobunyulu obuphezulu, ukuzinza kobushushu obuphezulu kunye nokumelana neekhemikhali eziphezulu

Iingubo zeTantalum carbide (TaC) ezinobunyulu obuphezulu, uzinzo lobushushu obuphezulu kunye nokumelana neekhemikhali eziphakamileyo

Inkcazelo emfutshane:

Ukwaleka kwe-TaC sisizukulwana esitsha sezinto ezikwaziyo ukumelana nobushushu obuphezulu, ezinozinzo olungcono lobushushu obuphezulu kuneSiC, sisebenza njengento ekwaziyo ukumelana nokudleka, ukumelana ne-oxidation, kunye nokunganxibi, kunokusetyenziswa kwindawo engaphezulu kwe-2000 ℃, esetyenziswa kakhulu I-aerospace yobushushu obuphezulu bobushushu obuphezulu, isizukulwana sesithathu sokukhula kwekristale enye ye-semiconductor kunye nezinye iindawo.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.Inkqubo ehamba phambili yokugqoka i-Semicera yenza iingubo ze-tantalum carbide (TaC) zifezekise ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor. Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.

Emva kweminyaka yophuhliso, iSemicera yoyisile iteknoloji yeCVD TaCngeenzame ezidibeneyo zesebe leR&D. Iziphene kulula ukwenzeka kwinkqubo yokukhula kwee-wafers ze-SiC, kodwa emva kokusetyenziswaI-TaC, umahluko ubalulekile. Apha ngezantsi luthelekiso lweewafers ezine-TaC nangaphandle kwayo, kunye neendawo zeSemicera zokukhula kwekristale enye.

Inxalenye ye-Tac yokukhula kwekristale enye

I-Antiwear tantalum carbide coating_ Ikhusela izixhobo ekunxibeni nasekudlekeni Umfanekiso okhoyo

Igraphite eneringi egqunywe yi-TaC

kunye nangaphandle kwe-TaC

Emva kokusebenzisa i-TaC (ekunene)

Ukongeza, ubomi benkonzo yeemveliso zokugquma ze-TaC zeSemicera bude kwaye buxhathisa ngakumbi kubushushu obuphezulu kunobo bokwaleka kwe-SiC. Emva kwexesha elide ledatha yomlinganiselo waselabhoratri, i-TaC yethu ingasebenza ixesha elide kubuninzi obungama-2300 degrees celcius. Ezi zilandelayo zezinye zeesampulu zethu: