SemiceraI-TaC Coating Chuck, i-vacuum chuck ye-cutting-edge enezixhoboIingubo ze-TaC, eyenzelwe ngokukodwa iifurnaces ze-semiconductor. Yenzelwe ukuhlangabezana neemfuno ezingqongqo zeenkqubo zale mihla zokwenziwa kwe-semiconductor, obu buchwephesha buseta umgangatho omtsha wokuchaneka, ukuthembeka, kunye nobomi obude.
Embindini wokwenziwa kwe-semiconductor kukho imfuno ebalulekileyo yolawulo oluchanekileyo kunye nokuzinza ngexesha lokucubungula. I-TaC Coating Chuck ijongana nale mfuno ngokudibanisa phambiliTaC (Tantalum Carbide) iingubokumphezulu wayo, iqinisekisa uzinzo olukhethekileyo lwe-thermal, ukuqina, kunye nokuxhathisa ukubola kweekhemikhali. Le ndibaniselwano yahlukileyo yemathiriyeli ayiphuculi kuphela ukusebenza kwe-chuck kodwa yandisa ubomi bayo bokusebenza, ibonelela ngeziphumo ezingaguqukiyo kwimijikelo engenakubalwa.
Enye yeenzuzo eziphambili ze-TaC Coating Chuck kukukwazi kwayo ukugcina inqanaba eliphezulu lengqibelelo yevacuum kuwo wonke umjikelo wokulungisa. Ngokunciphisa ngokufanelekileyo ukuphuma kunye nokungcola, obu buchwepheshe buqinisekisa ukucoceka kunye nomgangatho wezinto eziphathekayo ze-semiconductor, okubangelwa ukusebenza kwesixhobo esiphezulu kunye nokuthembeka.
Ngaphaya koko, i-TaC Coating Chuck ibonelela ngezinto ezininzi ezingafaniyo, ezithatha uluhlu olubanzi lweesemiconductor substrates ezinobungakanani obahlukeneyo kunye neejometri. Uyilo olunokwenziwa ngokwezifiso lwe-TaC Coating Chuck luvumela ukudityaniswa ngokungenamthungo kwiinkqubo zomlilo zesemiconductor ezikhoyo, ukunciphisa ixesha lokuphumla kunye nokwandisa imveliso.
Nge-TaC Coating Chuck, abavelisi be-semiconductor banokufikelela kwi-throughput ephezulu, isivuno esiphuculweyo, kunye nokunciphisa iindleko zizonke. Nokuba kukwiilabhoratri zophando okanye kumaziko okuvelisa umthamo ophezulu, obu buchwepheshe buphambili buxhobisa iingcali ze-semiconductor ukutyhala imida yokuqamba izinto ezintsha ngelixa zigcina imigangatho engqongqo yobulunga.
kunye nangaphandle kwe-TaC
Emva kokusebenzisa i-TaC (ekunene)
Ngaphezu koko, iSemicera'sIimveliso ezigqunywe yi-TaCbonisa ubomi benkonzo obude kunye nokumelana nobushushu obuphezulu xa kuthelekiswaIingubo zeSiC.Imilinganiselo yeLabhoratri ibonise ukuba yethuIingubo ze-TaCiyakwazi ukusebenza rhoqo kumaqondo obushushu ukuya kuma 2300 degrees Celsius ixesha elide. Ngezantsi yimizekelo yeesampulu zethu:
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Ubunyulu obuphezulu be-tantalum carbide yokwenza ngokwezifiso imveliso
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Iingubo zeTantalum carbide (TaC) ezine purit ephezulu...
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I-Tantalum Carbide (TaC) ipleyiti yokuNgqumisa
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Iringi ye-TaC enamacandelo amathathu
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Isixhobo se-Thermal field se-silicon carbide siyakhala...
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I-Tantalum Carbide (i-TaC) i-Wafer Susceptor ene-Coated