I-Semicera Silicon Substrates zenzelwe ukuhlangabezana neemfuno ezingqongqo zeshishini le-semiconductor, ebonelela ngomgangatho ongalinganiyo kunye nokuchaneka. Ezi substrates zibonelela ngesiseko esithembekileyo kwizicelo ezahlukeneyo, ukusuka kwiisekethe ezidibeneyo ukuya kwiiseli ze-photovoltaic, ziqinisekisa ukusebenza kakuhle kunye nokuphila ixesha elide.
Ukucoceka okuphezulu kweSemicera Silicon Substrates kuqinisekisa iziphene ezincinci kunye neempawu eziphezulu zombane, ezibaluleke kakhulu kwimveliso yezinto eziphezulu ze-elektroniki. Eli nqanaba lokucoceka linceda ekunciphiseni ukulahlekelwa kwamandla kunye nokuphucula ukusebenza kakuhle kwezixhobo ze-semiconductor.
I-Semicera isebenzisa iindlela zokuvelisa zanamhlanje ukuvelisa i-silicon substrates ngokufana okukhethekileyo kunye nokusicaba. Oku kuchaneka kubalulekile ekufezekiseni iziphumo ezingaguqukiyo kulwakhiwo lwe-semiconductor, apho nolona tshintsho luncinci lunokuchaphazela ukusebenza kwesixhobo kunye nesivuno.
Ifumaneka kwiindidi ezahlukeneyo zobukhulu kunye neenkcukacha, iSemicera Silicon Substrates ibonelela uluhlu olubanzi lweemfuno zoshishino. Nokuba uphuhlisa i-microprocessors okanye iiphaneli zelanga, ezi substrates zibonelela ngokuguquguquka kunye nokuthembeka okufunekayo kwisicelo sakho esithile.
I-Semicera izinikele ekuxhaseni izinto ezintsha kunye nokusebenza kakuhle kwishishini le-semiconductor. Ngokubonelela ngee-silicon substrates ezikumgangatho ophezulu, senza ukuba abavelisi batyhale imida yetekhnoloji, behambisa iimveliso ezihlangabezana neemfuno eziguqukayo zentengiso. Thembela i-Semicera kwisizukulwana sakho esilandelayo kwizisombululo ze-elektroniki kunye ne-photovoltaic.
Izinto | Imveliso | Uphando | Dummy |
Iiparamitha zeCrystal | |||
Iipolytype | 4H | ||
Imposiso yokuma kumphezulu | <11-20>4±0.15° | ||
Iiparamitha zoMbane | |||
I-Dopant | n-uhlobo lweNitrojeni | ||
Ukuxhathisa | 0.015-0.025ohm · cm | ||
Iiparamitha zoomatshini | |||
Ububanzi | 150.0±0.2mm | ||
Ukutyeba | 350±25 μm | ||
Ukuqhelaniswa neflethi ephambili | [1-100] ± 5 ° | ||
Ubude beflethi bokuqala | 47.5±1.5mm | ||
Iflethi yesibini | Akukho nanye | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Ukuqubuda | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
I-Wap | ≤35 μm | ≤45 μm | ≤55 μm |
Ngaphambili(Si-face) uburhabaxa(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Ulwakhiwo | |||
Ukuxinana kweMibhobho | <1 iya/cm2 | <10 i/cm2 | <15 i/cm2 |
Ukungcola kwesinyithi | ≤5E10athom/cm2 | NA | |
I-BPD | ≤1500 i-ea/cm2 | ≤3000 nge-cm2 | NA |
TSD | ≤500 i/cm2 | ≤1000 nge-cm2 | NA |
Umgangatho wangaphambili | |||
Ngaphambili | Si | ||
Ukugqitywa komphezulu | Si-ubuso CMP | ||
Amacandelo | ≤60ea/wafer (ubukhulu≥0.3μm) | NA | |
Imikrwelo | ≤5ea/mm. Ubude obongezelekayo ≤Ububanzi | Ubude obongezelekayo≤2*Ububanzi | NA |
Amaxolo e-orenji/imingxuma/amabala/imivimbo/ iintanda/ungcoliseko | Akukho nanye | NA | |
Iitshiphusi ze-Edge/i-idents/fracture/hex plates | Akukho nanye | ||
Iindawo zePolytype | Akukho nanye | Indawo eyongezelekayo≤20% | Indawo eyongezelekayo≤30% |
Ukumakishwa kwelaser yangaphambili | Akukho nanye | ||
Umgangatho wasemva | |||
Emva kokugqiba | C-ubuso CMP | ||
Imikrwelo | ≤5ea/mm,Ubude obongezelekayo≤2*Ububanzi | NA | |
Iziphene zangasemva (iitshiphusi zomphetho/iindindi) | Akukho nanye | ||
Umqolo uburhabaxa | Ra≤0.2nm (5μm*5μm) | ||
Ukumakishwa kwelaser yangasemva | 1 mm (ukusuka kumphetho ophezulu) | ||
Edge | |||
Edge | Chamfer | ||
Ukupakishwa | |||
Ukupakishwa | I-Epi ilungele ukupakishwa kwevacuum Ukupakishwa kweekhasethi ezininzi | ||
*Amanqaku: "NA" ithetha ukuba akukho sicelo Izinto ezingakhankanywanga zinokubhekisa kwi-SEMI-STD. |