Silicon carbide vacuum chucklicandelo eliphambili elisetyenziswa kwimveliso ye-semiconductor kunye nokuchaneka kwezicelo zemizi-mveliso ukubamba, ukuphatha kunye nokubeka iindawo zokusebenza ezibhityileyo neziethe-ethe ezifanaamaqebengwana, ii-substrates zeglasi kunye namacandelo optical. Isebenzisa amandla e-vacuum ukwenza uxinzelelo olubi, oluvumela ukuba lubambelele ngokuqinileyo kumphezulu we-workpiece kunye nokukhulula xa kuyimfuneko.I-silicon carbide vacuum chuckszisetyenziswa kakhulu kwimveliso ye-semiconductor, imiboniso yephaneli ecaba, ukwenziwa kwamehlo kunye nezinye iindawo ezichanekileyo zoshishino. Zingasetyenziselwa imisebenzi efana neiqhekezana lesonkaukulayishwa kunye nokudluliselwa, ukulungelelaniswa kwe-substrate, ukubamba ipleyiti yeglasi kunye nokuphatha, ukubonelela ngokuchaneka okuphezulu, ukuzinza okuphezulu kunye nezisombululo ezikhuselekileyo zokusingatha i-workpiece.
Iimpawu ze-silicon carbide vacuum chucks zilandelayo:
1. Ukumelana nokushisa okuphezulu: I-Silicon carbide inozinzo oluphezulu lweqondo lokushisa kwaye inokusebenza ixesha elide kwindawo yokushisa ephezulu ngaphandle komonakalo, efanelekileyo kwiinkqubo ezifuna ukulungiswa kweqondo lokushisa eliphezulu.
2. Ubunzima obuphezulu kunye nokuxhatshazwa kokugqoka: I-Silicon carbide inobunzima obuphezulu kwaye inokumelana nokuxhatshazwa kunye nokugqoka, ukwandisa ukuqina kunye nobomi be-chuck.
3. I-inertness yekhemikhali egqwesileyo: I-Silicon carbide inokumelana okuphezulu kwiintlobo zeekhemikhali kunye ne-solvents kwaye inokusebenza ngokuzinzile kwiindawo zeekhemikhali.
4. Ukutywinwa kwe-vacuum ephezulu: Iikomityi zokufunxa i-silicon carbide vacuum ziyakwazi ukubonelela ngokutywinwa kwe-vacuum ethembekileyo, ukuqinisekisa amandla e-adsorption azinzileyo kunye nokubamba ngokukhuselekileyo kwezixhobo zokusebenza.
Siyakwazi ukuyila kunye nokwenza ngokwemilinganiselo yakho ethile ngomgangatho olungileyo kunye nexesha lokuhambisa elifanelekileyo.
Iingenelo
Ukumelana ne-oxidation yobushushu obuphezulu
Uxhathiso olugqwesileyo lweCorrosion
Ukuxhathisa okulungileyo kweAbrasion
I-coefficient ephezulu yokushisa ukushisa
Ukuzithambisa, ukuxinana okuphantsi
Ukuqina okuphezulu
Uyilo olulungiselelweyo.
Usetyenziso
-Indawo ekwaziyo ukumelana nokunxiba: ibhulorho, ipleyiti, umbhobho wesanti, umgca wenkanyamba, umphanda wokusila, njl.
-Umgangatho wobushushu obuphezulu: i-siC Slab, iTube yokuCima iFurnace, iTube eRadiant, i-crucible, i-Heating Element, i-Roller, i-Beam, i-Heat Exchanger, i-Cold Air Pipe, i-Burner Nozzle, i-Thermocouple Protection Tube, isikhephe se-SiC, i-Kiln car Structure, i-Setter, njl.
-Ibala leBulletproof yoMkhosi
-I-Silicon Carbide Semiconductor: Isikhephe se-SiC wafer, i-sic chuck, i-sic paddle, i-sic cassette, i-sic diffusion ityhubhu, i-wafer fork, ipleyiti yokufunxa, isikhokelo, njl.
-I-Silicon Carbide Seal Field: zonke iintlobo zeringi yokutywina, ukuthwala, i-bushing, njl.
-I-Photovoltaic Field: I-Cantilever Paddle, i-Barrel yokugaya, i-Silicon Carbide Roller, njl.
-Indawo yebhetri yeLithium
