I-SiC-Coated Epitaxial Reactor Barel

Inkcazelo emfutshane:

I-Semicera inikezela ngoluhlu olubanzi lwee-susceptors kunye nezixhobo zegraphite ezenzelwe ii-epitaxy reactors ezahlukeneyo.

Ngobudlelwane obucwangcisiweyo kunye nee-OEM ezikhokelayo kwishishini, ubuchwephesha bezinto ezininzi, kunye nobuchule obuphambili bokuvelisa, iSemicera ihambisa uyilo olulungiselelwe ukuhlangabezana neemfuno ezithile zesicelo sakho.Ukuzibophelela kwethu ekugqweseni kuqinisekisa ukuba ufumana izisombululo ezizezona zifanelekileyo kwiimfuno zakho ze-epitaxy reactor.

 

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkcazo

Inkampani yethu ibonelelaUkwaleka kweSiCinkqubo yeenkonzo kumphezulu wegraphite, iiseramikhi kunye nezinye izinto nge-CVD indlela, ukuze iigesi ezikhethekileyo eziqulethe i-carbon kunye ne-silicon zinokusabela kubushushu obuphezulu ukuze zifumane iimolekyuli ze-Sic ezicocekileyo, ezinokuthi zifakwe kumphezulu wezinto ezigqunyiweyo ukwenzaUmaleko okhuselayo we-SiCyohlobo lwe-epitaxy barrel hy pnotic.

 

sis (1)

sis (2)

Iimpawu eziphambili

1. Ukumelana nobushushu obuphezulu be-oxidation:
Ukumelana ne-oxidation kusekuhle kakhulu xa ubushushu buphezulu ukuya kuma-1600 C.
2. Ukucoceka okuphezulu : yenziwe yi-chemical vapor deposition phantsi kwemeko yokushisa kwe-chlorination ephezulu.
3. Ukumelana nokhukuliseko: ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
4. Ukumelana nokubola: i-asidi, i-alkali, ityuwa kunye nee-reagents eziphilayo.

IiNgcaciso eziphambili ze-CVD-SIC Coating

Iipropati zeSiC-CVD
Ulwakhiwo lweCrystal FCC isigaba β
Ukuxinana g/cm ³ 3.21
Ukuqina Vickers ubulukhuni 2500
Ubungakanani benkozo μm 2~10
Ucoceko lweMichiza % 99.99995
Ubushushu Umthamo J·kg-1 ·K-1 640
Ubushushu bokunciphisa 2700
Amandla eFelexural MPa (RT 4-point) 415
Imodulus eselula I-Gpa (4pt bend, 1300℃) 430
Ukwandiswa kweThermal (CTE) 10-6K-1 4.5
I-Thermal conductivity (W/mK) 300
Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
Inkonzo yethu

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