Silicon Carbide Coating Graphite Susceptor

I-Silicon Carbide Coating yeGraphite Susceptor Umfanekiso obonakalayo

Inkcazelo emfutshane:

ISemicera Semiconductor's Silicon Carbide Coating Graphite Susceptor ibonelela nge-thermal conductivity ekhethekileyo kunye nokuqina kwezicelo ze-epitaxy. Thembela kwi-Semicera ye-susceptors ephucukileyo eyilelwe ukuphucula iinkqubo zakho ze-epitaxial ngetekhnoloji yokwambatha ye-SiC ephezulu.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkcazo

I-Semicera's SiC coated graphite susceptors zenziwe ngobunjineli zisebenzisa i-graphite substrates ezikumgangatho ophezulu, ezigqunywe ngobunono ngeSilicon Carbide (SiC) ngeenkqubo eziphucukileyo zeChemical Vapor Deposition (CVD). Olu yilo luyilayo luqinisekisa ukuxhathisa okukhethekileyo kumothuko we-thermal kunye nokuthotywa kweekhemikhali, ukwandisa ngokubonakalayo ubomi be-SiC coated graphite susceptor kunye nokuqinisekisa ukusebenza okuthembekileyo kuyo yonke inkqubo yokwenziwa kwe-semiconductor.

Ezona mpawu:

1. I-Superior Thermal ConductivityI-SiC coated graphite susceptor ibonisa ukuhanjiswa kwe-thermal okugqwesileyo, okubalulekileyo ekuchitheni ubushushu ngexesha lokwenziwa kwe-semiconductor. Olu phawu lunciphisa ukuthambeka kwe-thermal kumphezulu we-wafer, ukukhuthaza ukuhanjiswa okufanayo kobushushu kubalulekile ekufezekiseni iipropati ezinqwenelekayo ze-semiconductor.

2. Imichiza eyomeleleyo kunye neThermal Shock ResistanceI-coating ye-SiC inikezela ngokhuseleko olunzima kwi-corrosion yekhemikhali kunye nokutshatyalaliswa kwe-thermal, ukugcina ingqibelelo ye-graphite susceptor nakwiindawo zokucubungula ezinzima. Oku komelela okongeziweyo kunciphisa ixesha lokuphumla kwaye kwandise ixesha lokuphila, kube negalelo ekwandeni kwemveliso kunye nokusebenza kakuhle kweendleko kumaziko okwenziwa kwe-semiconductor.

3. Ukulungelelaniswa kweeMfuno eziZodwaI-SiC yethu egqunywe nge-graphite susceptors inokwenziwa ukuze ihlangabezane neemfuno ezithile kunye nezinto ezikhethwayo. Sinikezela ngoluhlu lweenketho zokwenza ngokwezifiso, kubandakanywa uhlengahlengiso lobungakanani kunye nokwahluka kobunzima bokugquma, ukuqinisekisa ukuguquguquka koyilo kunye nokusebenza okulungiselelwe kwezicelo ezahlukeneyo kunye neeparitha zenkqubo.

izicelo:

Ii-applicationsSemicera SiC coatings zisetyenziswa kumanqanaba ahlukeneyo okwenziwa kwe-semiconductor, kubandakanya:
1. -LED Chip Fabrication
2. -Imveliso yePolysilicon
3. -Semiconductor Ukukhula kweCrystal
4. -Silicon kunye neSiC Epitaxy
5. -I-Thermal Oxidation kunye ne-Diffusion (TO & D)