SiC Epitaxy

Inkcazelo emfutshane:

I-Semicera ibonelela ngefilimu ecekethekileyo yesiko (i-silicon carbide) i-SiC epitaxy kwii-substrates zophuhliso lwezixhobo ze-silicon carbide. I-Weitai izimisele ukubonelela ngeemveliso ezisemgangathweni kunye namaxabiso akhuphisanayo, kwaye sijonge phambili ekubeni liqabane lakho lexesha elide eChina.

 

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-SiC epitaxy (2)(1)

Ingcaciso yeMveliso

4h-n 4inch 6inch dia100mm sic seed wafer 1mm ubukhulu bokukhula kweingot

Ubungakanani obulungiselelweyo/2inch/3inch/4inch/6inch 6H-N/4H-SEMI/ 4H-N SIC ingots/Ubunyulu obuphezulu 4H-N 4inch 6inch dia 150mm isilicon carbide enye icrystal (sic) substrates wafersS/ Customzied as-cut sic wafersImveliso 4 ibakala 4H-N 1.5mm SIC Wafers ukwenzela crystal imbewu

Malunga neSilicon Carbide (SiC)Crystal

I-Silicon carbide (i-SiC), eyaziwa ngokuba yi-carborundum, i-semiconductor equkethe i-silicon kunye ne-carbon ene-chemical formula SiC. I-SiC isetyenziswa kwizixhobo ze-elektroniki ze-semiconductor ezisebenza kumaqondo obushushu aphezulu okanye amandla ombane aphezulu, okanye zombini.I-SiC ikwayenye yezinto ezibalulekileyo ze-LED, iyindawo esezantsi ethandwayo yokukhulisa izixhobo ze-GaN, kwaye ikwasebenza njengesasazi sobushushu kwindawo ephezulu- ii-LEDs zamandla.

Inkcazo

Ipropati

I-4H-SiC, iCrystal enye

I-6H-SiC, iCrystal enye

Iiparamitha zeLattice

a=3.076 Å c=10.053 Å

a=3.073 Å c=15.117 Å

Ulandelelwano lokupakisha

ABCB

ABCACB

Mohs Ubunzima

≈9.2

≈9.2

Ukuxinana

3.21 g/cm3

3.21 g/cm3

Therm. Ukwandiswa kwe-Coefficient

4-5×10-6/K

4-5×10-6/K

Refraction Index @750nm

hayi = 2.61
ne = 2.66

hayi = 2.60
ne = 2.65

Dielectric Constant

c~9.66

c~9.66

I-Thermal Conductivity (uhlobo lwe-N, 0.02 ohm.cm)

a ~ 4.2 W/cm·K@298K
c~3.7 W/cm·K@298K

 

I-Thermal Conductivity (iSemi-insulating)

a~4.9 W/cm·K@298K
c~3.9 W/cm·K@298K

a ~ 4.6 W/cm·K@298K
c~3.2 W/cm·K@298K

Band-umsantsa

3.23 eV

3.02 eV

Ukuqhekeka-kwiNdawo yoMbane

3-5 × 106V / cm

3-5 × 106V / cm

Saturation Drift Velocity

2.0×105m/s

2.0×105m/s

Iifafa zeSiC

Semicera Indawo yokusebenzela Indawo yokusebenza yeSemicera 2 Umatshini wezixhobo Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD Inkonzo yethu


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