I-SiC cantilever paddle silicon carbide diffusion paddle

Inkcazelo emfutshane:

I-silicon carbide paddle, ekwabizwa ngokuba yi-silicon carbide cantilever paddle, isilicon carbide cantilever beam luhlobo lwemveliso ye-silicon carbide ceramic emva kwe-1850 ℃ ubushushu obuphezulu bokuntywila, kodwa ubushushu obuphezulu be-silicon carbide ceramic yimveliso ekhethekileyo ye-ceramic, ngamasuntswana amahle α-SiC. kunye nezongezo zicinezelwe kwindawo engenanto, ekudibaneni ne-silicon engamanzi kwiqondo lokushisa eliphezulu, ikhabhoni kwindawo engenanto kunye nokungena kwe-Si reaction, ukubunjwa kwe-β-SiC, kwaye idibaniswe ne-α-SiC, i-silicon yamahhala igcwalise i-porosity, ukuze ufumane izinto ze-ceramic ezixinzelelekileyo; Ineempawu eziphezulu ezahlukeneyo zeekeramics zamashishini.


Iinkcukacha zeMveliso

Iithegi zeMveliso

IiSemicera'sIipaddles zeSiCzenzelwe ukwandiswa okuncinci kwe-thermal, ukubonelela uzinzo kunye nokuchaneka kwiinkqubo apho ukuchaneka komda kubalulekile. Oku kubenza balungele izicelo aphoamaqebengwanaziphantsi kwemijikelo yokufudumeza kunye nokupholisa ngokuphindaphindiweyo, njengoko isikhephe esisicaba sigcina ingqibelelo yesakhiwo, siqinisekisa ukusebenza okungaguqukiyo.

Ukubandakanya iSemicera'si-silicon carbide diffusion paddleskumgca wakho wemveliso kuya kwandisa ukuthembeka kwenkqubo yakho, ngenxa yeempawu zabo eziphezulu zokushisa kunye neekhemikhali. La maphini okubheqa alungele ukusasazwa, i-oxidation, kunye neenkqubo zokubopha, ukuqinisekisa ukuba iiwafa ziphathwa ngononophelo kunye ngokuchanekileyo kwinyathelo ngalinye.

Ukwenziwa kwezinto ezintsha kusembindini weSemicera'sI-SiC ipaddleuyilo. La maphini okubheqa alungelelaniswe ukuba alingane ngokungenamthungo kwisixhobo se-semiconductor esele ikho, ebonelela ngobuchule bokuphatha obuphuculweyo. Ubume obukhaphukhaphu kunye noyilo lwe-ergonomic aluphuculi kuphela ukuthuthwa kwe-wafer kodwa lunciphisa ixesha lokuphumla, okukhokelela kwimveliso elungelelanisiweyo.

 

Iimpawu ezibonakalayo zeRecrystallized Silicon Carbide

Ipropati

Ixabiso eliqhelekileyo

Ubushushu bokusebenza (°C)

1600°C (neoksijini), 1700°C (ukunciphisa okusingqongileyo)

Umxholo weSiC

> 99.96%

Isiqulatho sasimahla Si

< 0.1%

Unizi lolwapho kuyiwa khona

2.60-2.70 g / cm3

I-porosity ebonakalayo

< 16%

Amandla oxinzelelo

> 600 MPa

Amandla okugoba okubandayo

80-90 MPa (20°C)

Amandla okugoba ashushu

90-100 MPa (1400°C)

Ukwandiswa kweThermal @1500°C

4.70 10-6/°C

I-Thermal conductivity @1200°C

23 W/m•K

Imodyuli ye-elastic

240 GPA

Ukuxhathisa ukothuka kwe-Thermal

Ulunge kakhulu

I-Cantilever Paddle (3)
I-Cantilever Paddle (21)
fd658ca43ee41331d035aad94b7a9cc
Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
Semicera Ware House
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