Yintoni i-MOCVD Susceptor?

I-Metal-Organic Chemical Vapor Deposition (MOCVD) yinkqubo ebalulekileyo kwishishini le-semiconductor, apho iifilimu ezikumgangatho ophezulu ezicekethekileyo zifakwa kwi-substrates. Inxalenye ephambili yenkqubo ye-MOCVD yi-susceptor, into ebalulekileyo edlala indima ebalulekileyo ekuqinisekiseni ukufana kunye nomgangatho weefilimu eziveliswayo.

Yintoni i-Susceptor? I-susceptor licandelo elikhethekileyo elisetyenziswa kwinkqubo ye-MOCVD ukuxhasa kunye nokufudumeza i-substrate apho iifilimu ezincinci zifakwe kuyo. Isebenza imisebenzi emininzi, kubandakanya ukufunxa amandla ombane, ukuwaguqulela kubushushu, kunye nokusabalalisa ngokulinganayo obu bushushu kwi-substrate. Oku kufudumeza okufanayo kubalulekile ekukhuleni kweefilimu ezilinganayo kunye nobukhulu obuchanekileyo kunye nokubunjwa.

Iindidi zabarhanelwa:
1. I-Graphite Susceptors: Ngokuqhelekileyo ifakwe ngomqolo okhuselayo, njengei-silicon carbide (SiC), i-graphite susceptors iyaziwa ngokuba yi-thermal conductivity ephezulu kunye nokuzinza. IUkwaleka kweSiCinikeza indawo enzima, ekhuselayo exhathisa ukubola kunye nokuthotywa kwamaqondo aphezulu.

2. I-Silicon Carbide (i-SiC) i-Susceptors: Ezi zenziwe ngokupheleleyo kwi-SiC, zinika uzinzo oluhle kakhulu lwe-thermal kunye nokuchasana nokugqoka kunye nokukrazula.I-SiC susceptorszifanelekile ngokukodwa kwiinkqubo zobushushu obuphezulu kunye neendawo ezinobungozi.
NjaniAbarhanelwaSebenza kwi-MOCVD:

Kwinkqubo ye-MOCVD, ii-precursors zingeniswa kwigumbi le-reactor, apho zibola kwaye ziphendule ukwenza ifilimu encinci kwi-substrate. I-susceptor idlala indima ebalulekileyo ngokuqinisekisa ukuba i-substrate ifudunyezwa ngokufanayo, into ebalulekileyo ekufezekiseni iipropati zefilimu ezingaguqukiyo kuwo wonke umphezulu we-substrate. Izinto ze-susceptor kunye noyilo zikhethwe ngononophelo ukuze zihambelane neemfuno ezithile zenkqubo yokubeka, njengoluhlu lobushushu kunye nokuhambelana kweekhemikhali.
Iingenelo ZokusebenzisaAbaxhamli abakumgangatho ophezulu:
• Ukuphuculwa koMgangatho weFilimu: Ngokubonelela ngokusasazwa kobushushu obufanayo, i-susceptors inceda ekufezekiseni iifilimu ezinobunzima obuhambelanayo kunye nokwakheka, okubalulekileyo ekusebenzeni kwezixhobo ze-semiconductor.
• Ukonyuka kweNkqubo yokuSebenza: Abaxhamli bekhwalithi ephezulu baphucula ukusebenza kakuhle kwenkqubo ye-MOCVD ngokunciphisa amathuba okuba neziphene kunye nokwandisa isivuno seefilimu ezisebenzisekayo.
Ubomi obude kunye nokuthembeka: Ii-susceptors ezenziwe kwizinto ezihlala zihlala njenge-SiC ziqinisekisa ukuthembeka kwexesha elide kunye nokunciphisa iindleko zokugcina.

Isiphelo: I-susceptor yinxalenye eyimfuneko kwinkqubo ye-MOCVD, ichaphazela ngokuthe ngqo umgangatho kunye nokusebenza kakuhle kwefilimu encinci yokubeka ifilimu. Ngokukhetha imathiriyeli efanelekileyo ye-susceptor kunye noyilo, abavelisi be-semiconductor banokuzenza ngcono iinkqubo zabo, okukhokelela ekusebenzeni ngcono kwesixhobo kunye neendleko eziphantsi zemveliso. Njengoko imfuno yezixhobo zombane ezisebenza ngokuphezulu iqhubeka ikhula, ukubaluleka kwe-MOCVD susc ekumgangatho ophezulu