Tantalum Carbide MOCVD heater

Inkcazelo emfutshane:

Izifudumezi ze-Semicera Tantalum Carbide MOCVD zenzelwe ukujamelana namaqondo obushushu agqithisileyo ukuya kuthi ga kwi-2300 ° C, ukuhambisa ukusebenza kobushushu obungahambelaniyo kwiinkqubo eziphambili. Ngexesha elithembekileyo leentsuku ze-30, i-Semicera iqinisekisa ukuba ezi zifudumezi zibonelela ngomgangatho ophezulu kunye nokusebenza kakuhle, okwenza zibe zilungele ukufunwa kwezicelo zoshishino.

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SemiceraTantalum CarbideIzifudumezi zeMOCVD zakhelwe ezona zicelo zifunwa kakhulu zobushushu obuphezulu, ezikwaziyo ukufikelela kumaqondo obushushu ukuya kuma 2300°C. Ezi zifudumezi zibonelela ngozinzo olukhethekileyo lwe-thermal, ukuqinisekisa ukusebenza okufanayo kunye nokuthembekileyo kwiinkqubo ze-metal-organic chemical vapor deposition (MOCVD). I-Semicera iqinisekisa iimveliso ezigqwesileyo ngokuzinzileyo kunye nokuchaneka, ezilungiselelwe ukuhlangabezana neemfuno zamashishini aphambili.

Idizayinwe kusetyenziswa izinto eziphambili ze-tantalum carbide, ezi zifudumezi ze-MOCVD zibonelela ngokuxhathisa okugqwesileyo kwi-oxidation kunye nokubola kweekhemikhali, nakwiqondo lobushushu eliphakamileyo. Oku kuhlala kubenza babe lolona khetho lufanelekileyo kwimveliso ye-semiconductor, i-epitaxy, kunye nezinye izicelo eziphezulu zokushisa ezifuna ukuchaneka kunye nokuthembeka.

Iimpawu eziphezulu ze-thermal zeSemiceraTantalum CarbideIzifudumezi ze-MOCVD zinegalelo ekuphuculeni inkqubo esebenzayo. Ulwakhiwo lwabo olomeleleyo lunciphisa ukwanda kwe-thermal kunye nokulahleka kobushushu, kuqinisekisa ukuhanjiswa okufanayo kobushushu kuyo yonke i-substrate. Oku kukhokelela ekuphuculweni komgangatho wemveliso kunye nokuncipha kweendleko zokusebenza.

I-Semicera inikezelwe ekuboneleleni ngezifudumezi ezingahlangani kuphela kodwa zigqithise imigangatho yoshishino. NgamnyeTantalum CarbideI-MOCVD Heater ithatha amanyathelo angqongqo okulawula umgangatho ukuqinisekisa ukusebenza okuphezulu. Ngethuba leentsuku ze-30, i-Semicera ihambisa ukuthembeka kunye nesantya esifunwa yimisebenzi yanamhlanje yamashishini.

Nokuba kukwi-semiconductor, i-aerospace, okanye imimandla yophando lwemathiriyeli, iSemiceraTantalum CarbideIzifudumezi ze-MOCVD ziyindlela yokuya kwisisombululo sokufikelela kwiziphumo eziphezulu kwiinkqubo zobushushu obuphezulu. Ukusebenza kwabo okungaqhelekanga kwi-2300 ° C kubenza babaluleke kakhulu kwizicelo apho ukuchaneka kunye nokuqina kubaluleke kakhulu.