Tantalum carbide camera graphite sheetyimathiriyeli yegraphite enomaleko obhityileyo wetantalum carbidekumphezulu we-substrate. Umaleko obhityileyo we-tantalum carbide udla ngokubunjwa kumphezulu we-graphite substrate ngobuchule obufana ne-physical vapor deposition (PVD) okanye i-chemical vapor deposition (CVD). Olu tyaba luneempawu ezibalaseleyo ezinjengokuqina okuphezulu, ukuxhathisa okugqwesileyo kokunxiba, ukuxhathisa kwi-corrosion kunye nokuzinza okuphezulu kobushushu.
I-Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.Inkqubo ehamba phambili yokugqoka i-Semicera yenza iingubo ze-tantalum carbide (TaC) zifezekise ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor. Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.
Emva kweminyaka yophuhliso, iSemicera yoyisile iteknoloji yeCVD TaCngeenzame ezidibeneyo zesebe leR&D. Iziphene kulula ukwenzeka kwinkqubo yokukhula kwee-wafers ze-SiC, kodwa emva kokusetyenziswaI-TaC, umahluko ubalulekile. Apha ngezantsi luthelekiso lweewafers ezine-TaC nangaphandle kwayo, kunye neendawo zeSimicera zokukhula kwekristale enye.
Iingenelo eziphambili zetantalum carbide coated graphite sheet ziquka:
1. Ukumelana nokushisa okuphezulu: I-Tantalum carbide inendawo ephezulu yokunyibilika kunye nokuzinza okuphezulu kweqondo lokushisa, okwenza i-graphite sheet edibeneyo ilungele ukusetyenziswa kwiindawo eziphezulu zokushisa.
2. Ukumelana nokubola: I-Tantalum carbide coating inokumelana nokukhukuliseka kwezinto ezininzi ezinobungozi beekhemikhali kunye nokwandisa ubomi benkonzo yezinto.
3. Ubunzima obuphezulu: Ubunzima obuphezulu be-tantalum carbide umaleko obhityileyo bubonelela ngokumelana nokunxiba kakuhle kwaye kufanelekile kwizicelo ezifuna ukumelana nokunxiba okuphezulu.
4. Ukuzinza kweekhemikhali: I-Tantalum carbide coating inozinzo oluhle kakhulu kwi-chemical corrosion kwaye ifanelekile ukuba isetyenziswe kwimidiya ethile ephazamisayo.
kunye nangaphandle kwe-TaC
Emva kokusebenzisa i-TaC (ekunene)
Ngaphezu koko, iSemicera'sIimveliso ezigqunywe yi-TaCbonisa ubomi benkonzo obude kunye nokumelana nobushushu obuphezulu xa kuthelekiswaIingubo zeSiC.Imilinganiselo yeLabhoratri ibonise ukuba yethuIingubo ze-TaCiyakwazi ukusebenza rhoqo kumaqondo obushushu ukuya kuma 2300 degrees Celsius ixesha elide. Ngezantsi yimizekelo yeesampulu zethu:
