I-Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.Inkqubo ehamba phambili yokugqoka i-Semicera yenza iingubo ze-tantalum carbide (TaC) zifezekise ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor. Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.
I-Tantalum carbide coated wafer carriers isetyenziswa ngokubanzi kwi-wafer processing kunye neenkqubo zokuphatha kwiinkqubo zokwenziwa kwe-semiconductor. Banikezela ngenkxaso ezinzileyo kunye nokhuseleko lokuqinisekisa ukhuseleko, ukuchaneka kunye nokuhambelana kwee-wafers ngexesha lenkqubo yokuvelisa. I-Tantalum carbide coatings inokwandisa ubomi benkonzo yomphathi, ukunciphisa iindleko, kunye nokuphucula umgangatho kunye nokuthembeka kweemveliso ze-semiconductor.
Inkcazo ye tantalum carbide coated wafer carrier yile ilandelayo:
1. Ukukhethwa kwezinto eziphathekayo: I-Tantalum carbide yinto esebenza kakuhle kakhulu, ubunzima obuphezulu, indawo ephezulu yokunyibilika, ukuxhathisa kwe-corrosion kunye neempawu ezigqwesileyo zomatshini, ngoko ke isetyenziswa ngokubanzi kwinkqubo yokuvelisa i-semiconductor.
2. Ukugquma komhlaba: I-Tantalum carbide coating isetyenziswe kumphezulu we-wafer carrier ngokusebenzisa inkqubo ekhethekileyo yokugqoka ukwenza iyunifomu kunye ne-tantalum carbide coating. Le ngubo inokubonelela ngokhuseleko olongezelelweyo kunye nokumelana nokunxiba, ngelixa une-conductivity enhle ye-thermal.
3. I-Flatness kunye nokuchaneka: I-Tantalum carbide coated wafer carrier inomlinganiselo ophezulu wokutya kunye nokuchaneka, iqinisekisa ukuzinza kunye nokuchaneka kwee-wafers ngexesha lenkqubo yokuvelisa. Ukuthe tyaba kunye nokugqiba kwendawo yokuthwala kubalulekile ukuqinisekisa umgangatho kunye nokusebenza kwe-wafer.
4. Ukuzinza kobushushu: I-Tantalum carbide coated wafer carriers inokugcina uzinzo kwiindawo eziphakamileyo zeqondo lokushisa ngaphandle kokuguqulwa okanye ukukhulula, ukuqinisekisa ukuzinza kunye nokuhambelana kwee-wafers kwiinkqubo eziphezulu zokushisa.
5. I-Corrosion resistance: I-Tantalum carbide coatings inokumelana ne-corrosion egqwesileyo, inokumelana nokukhukuliseka kweekhemikhali kunye ne-solvents, kunye nokukhusela umthwali kwi-corrosion yamanzi kunye negesi.
kunye nangaphandle kwe-TaC
Emva kokusebenzisa i-TaC (ekunene)
Ngaphezu koko, iSemicera'sIimveliso ezigqunywe yi-TaCbonisa ubomi benkonzo obude kunye nokumelana nobushushu obuphezulu xa kuthelekiswaIingubo zeSiC.Imilinganiselo yeLabhoratri ibonise ukuba yethuIingubo ze-TaCiyakwazi ukusebenza rhoqo kumaqondo obushushu ukuya kuma 2300 degrees Celsius ixesha elide. Ngezantsi yimizekelo yeesampulu zethu:
