TaC Coated Ubunzulu UV LED MOCVD Graphite Susceptor

Inkcazelo emfutshane:

I-TaC Coated Deep UV LED MOCVD Graphite Susceptor yi-Semicera yenzelwe ukusebenza okuphezulu kwi-MOCVD epitaxy applications. Yenziwe e-China, ibonelela ngokuqina okongeziweyo kunye nokumelana nobushushu obuphezulu, iyenza ilungele iimeko ezibango. Itekhnoloji yokugquma yeSemicera iqinisekisa ukusebenza okuthembekileyo nokusebenzayo, ixhasa umgangatho ophezulu wemveliso ye-UV LED.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-TaC iqatyweisiseko esinzulu se-ultraviolet LED graphite sibhekisa kwinkqubo yokuphucula ukusebenza kunye nokuzinza kwesixhobo ngokufaka idiphozithiTaC ukutyabekakwisiseko segraphite ngexesha lokulungiswa kwesixhobo esinzulu se-ultraviolet LED. Le ngubo inokuphucula ukusebenza kokutshatyalaliswa kobushushu, ukumelana nobushushu obuphezulu kunye nokumelana ne-oxidation yesixhobo, ngaloo ndlela kuphuculwe ukusebenza kakuhle kunye nokuthembeka kwesixhobo se-LED. Izixhobo ezinzulu ze-ultraviolet ze-LED zivame ukusetyenziswa kwezinye iindawo ezikhethekileyo, ezifana ne-disinfection, ukunyanga ukukhanya, njl., ezineemfuno eziphezulu zokuzinza kunye nokusebenza kwesixhobo. Ukusetyenziswa kweI-TaC eqatywe igraphiteisiseko sinokuphucula ngokufanelekileyo ukuqina kunye nokusebenza kwesixhobo, ukubonelela ngenkxaso ebalulekileyo ekuphuhliseni iteknoloji ye-ultraviolet ye-LED enzulu.

I-Semicera ibonelela ngeengubo ezikhethekileyo ze-tantalum carbide (TaC) kumacandelo ahlukeneyo kunye nabathwali.Inkqubo ehamba phambili yokugqoka i-Semicera yenza iingubo ze-tantalum carbide (TaC) zifezekise ukucoceka okuphezulu, ukuzinza kweqondo lokushisa eliphezulu kunye nokunyamezela kweekhemikhali eziphezulu, ukuphucula umgangatho wemveliso ye-crystals ye-SIC / GAN kunye neengqimba ze-EPI (Isixhasi seTaC esigqunywe ngegraphite), kunye nokwandisa ubomi bamacandelo angundoqo we-reactor. Ukusetyenziswa kwetantalum carbide TaC coating kukusombulula ingxaki edge kunye nokuphucula umgangatho wokukhula kwekristale, kwaye iSemicera iye yasombulula itekhnoloji ye-tantalum carbide coating (CVD), ifikelele kwinqanaba eliphezulu lamazwe ngamazwe.

Emva kweminyaka yophuhliso, iSemicera yoyisile iteknoloji yeCVD TaCngeenzame ezidibeneyo zesebe leR&D. Iziphene kulula ukwenzeka kwinkqubo yokukhula kwee-wafers ze-SiC, kodwa emva kokusetyenziswaI-TaC, umahluko ubalulekile. Apha ngezantsi luthelekiso lweewafers ezine-TaC nangaphandle kwayo, kunye neendawo zeSimicera zokukhula kwekristale enye.

Ukusebenza okuphezulu kwetantalum carbide coating_ kuphucula ukusebenza kakuhle kwemveliso yemizi-mveliso kunye nokunciphisa iindleko zokugcinwa komfanekiso obonakalayo

Inxalenye ye-Tac yokukhula kwekristale enye

I-Antiwear tantalum carbide coating_ Ikhusela izixhobo ekunxibeni nasekudlekeni Umfanekiso okhoyo

Igraphite eneringi egqunywe yi-TaC

kunye nangaphandle kwe-TaC

Emva kokusebenzisa i-TaC (ekunene)

Ngaphezu koko, iSemicera'sIimveliso ezigqunywe yi-TaCbonisa ubomi benkonzo obude kunye nokumelana nobushushu obuphezulu xa kuthelekiswaIingubo zeSiC.Imilinganiselo yeLabhoratri ibonise ukuba yethuIingubo ze-TaCiyakwazi ukusebenza rhoqo kumaqondo obushushu ukuya kuma 2300 degrees Celsius ixesha elide. Ngezantsi yimizekelo yeesampulu zethu: