I-Silicon Carbide efakwe kwi-Graphite Wafer Carriers

ISilicon Carbide Coated Graphite Wafer Carriers Featured Image

Inkcazelo emfutshane:

ISemicera Semiconductor's Silicon Carbide Coated Graphite Wafer Carriers zinika amandla akhethekileyo kunye nozinzo lwe-thermal yokuphatha i-wafer. Khetha i-Semicera kubathwali abaphezulu bokusebenza ngetekhnoloji yokugquma ye-SiC ephucukileyo, iqinisekisa ukuqina okuphuculweyo kunye nokusebenza kakuhle kwizicelo ze-semiconductor.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Inkcazo

I-Semicorex Wafer Carriers ene-SiC Coating ibonelela ngozinzo olukhethekileyo lwe-thermal kunye ne-conductivity, iqinisekisa ukuhanjiswa kobushushu obufanayo ngexesha leenkqubo ze-CVD, okubalulekileyo kwifilimu ekumgangatho ophezulu kunye neempawu zokugquma.

Ezona mpawu:

1. UkuZinza kwe-Thermal okugqwesileyo kunye nokuPhathaIzithwali zethu ze-wafer ezigqunywe nge-SiC zigqwesile ekugcineni amaqondo obushushu azinzile kwaye angaguquguquki, kubalulekile kwiinkqubo ze-CVD. Oku kuqinisekisa ukuhanjiswa kobushushu obufanayo, okukhokelela kwifilimu ebhityileyo ephezulu kunye nomgangatho wokugquma.

2. Ukwenziwa ngokuchanekileyoIsithwali ngasinye se-wafer senziwa ngokwemigangatho echanekileyo, iqinisekisa ubukhulu obufanayo kunye nokuguda komphezulu. Oku kuchanekileyo kubalulekile ekufezekiseni amaxabiso angaguqukiyo okubekwa kunye neepropathi zefilimu kuzo zonke iiwafers ezininzi, ukunyusa umgangatho wemveliso ngokubanzi.

3. Umqobo wokungcolaI-coating ye-SiC isebenza njengesithintelo esingenakunqongophala, ukuthintela ukusasazwa kokungcola kwi-susceptor kwi-wafer. Oku kunciphisa umngcipheko wongcoliseko, obaluleke kakhulu ekuveliseni izixhobo ze-semiconductor ezicocekileyo.

4. Ukuqina kunye nokuSebenza kweendlekoUlwakhiwo olomeleleyo kunye nokugquma kwe-SiC kwandisa ukuqina kwezithwali ze-wafer, ukunciphisa ukuphindaphinda kokutshintshwa kwe-susceptor. Oku kukhokelela kwiindleko zokugcina eziphantsi kunye nokunciphisa ixesha lokunciphisa, ukwandisa ukusebenza kakuhle kwemisebenzi yokuvelisa i-semiconductor.

5. Iinketho zokwenza ngokwezifisoI-Semicorex Wafer Carriers ene-SiC Coating inokwenziwa ngokwezifiso ukuze ihlangabezane neemfuno ezithile zenkqubo, kubandakanya ukuhluka kobukhulu, imilo, kunye nobukhulu bokugquma. Oku kuguquguquka kuvumela ukulungelelaniswa kwe-susceptor ukuhambelana neemfuno ezizodwa zeenkqubo ezahlukeneyo zokwenziwa kwe-semiconductor. Iinketho zokwenza ngokwezifiso zivumela uphuhliso loyilo lwe-susceptor olulungiselelwe usetyenziso olukhethekileyo, olufana nokuveliswa kwevolumu ephezulu okanye uphando kunye nophuhliso, ukuqinisekisa ukusebenza kakuhle kwiimeko ezithile zokusetyenziswa.