Inkcazo
I-Semicorex's SiC Wafer Susceptors ye-MOCVD (i-Metal-Organic Chemical Vapor Deposition) zenziwe ngobunjineli ukuhlangabezana neemfuno ezichanekileyo zeenkqubo zokubeka i-epitaxial. Ukusebenzisa umgangatho ophezulu we-Silicon Carbide (i-SiC), ezi zixhasi zinika ukuqina okungenakulinganiswa kunye nokusebenza kwindawo yokushisa ephezulu kunye ne-corrosion, iqinisekisa ukukhula okuchanekileyo kunye nokusebenzayo kwezixhobo ze-semiconductor.
Ezona mpawu:
1. IiPropati zeMathiriyeli eziPhezuluYakhelwe kwi-SiC yomgangatho ophezulu, ii-wafer susceptivity zethu zibonisa i-thermal conductivity ekhethekileyo kunye nokumelana neekhemikhali. Ezi zakhiwo zibenza bakwazi ukujamelana neemeko ezinzima zeenkqubo ze-MOCVD, kubandakanywa ukushisa okuphezulu kunye neegesi ezinobungozi, ukuqinisekisa ixesha elide kunye nokusebenza okuthembekileyo.
2. Ukuchaneka kwi-Epitaxial DepositionUbunjineli obuchanekileyo be-SiC Wafer Susceptors yethu iqinisekisa ukuhanjiswa kobushushu obufanayo kuwo wonke umphezulu we-wafer, iququzelela ukukhula okungaguqukiyo kunye nomgangatho ophezulu we-epitaxial layer. Oku kuchanekileyo kubalulekile ekuveliseni i-semiconductors eneempawu zombane ezifanelekileyo.
3. Ukomelezwa koKuhlala ixesha elideIzinto eziqinileyo ze-SiC zibonelela ngokugqwesa ukuxhathisa ukunxitywa kunye nokuthotywa, naphantsi kokuvezwa ngokuqhubekayo kwiimeko zenkqubo enzima. Oku kuqina kunciphisa ukuphindaphinda kokutshintshwa kwe-susceptor, ukunciphisa ixesha lokuphumla kunye neendleko zokusebenza.
izicelo:
I-Semicorex's SiC Wafer Susceptors ye-MOCVD ifanelekele ngokufanelekileyo:
• Ukukhula kwe-Epitaxial yemathiriyeli ye-semiconductor
• Iinkqubo zeMOCVD zobushushu obuphezulu
• Ukuveliswa kwe-GaN, i-AlN, kunye nezinye ii-semiconductors ezihlanganisiweyo
• Ukwenziwa kwezicelo ezikwizinga eliphezulu le-semiconductor
IiNgcaciso eziPhambili ze-CVD-SIC yoMtyaliso:
Izibonelelo:
•Ukuchaneka okuphezulu: Iqinisekisa ukukhula okufanayo kunye nomgangatho ophezulu we-epitaxial.
•Ukusebenza ixesha elide: Ukuqina okukhethekileyo kunciphisa ukuphindaphinda kokutshintshwa.
• Ukusebenza kakuhle kweendleko: Ukunciphisa iindleko zokusebenza ngokunciphisa ixesha kunye nokugcinwa.
•Ukuguquguquka: Customizable ukuze ilingane neemfuno zenkqubo ye-MOCVD.