Semicerayazisa iIkhasethi yeSemiconductor, isixhobo esibalulekileyo sokuphatha ngokukhuselekileyo kunye nokusebenza kakuhle kweewafers kuyo yonke inkqubo yokuvelisa i-semiconductor. Yenziwe ngobuchwephesha obuphezulu, le khasethi iqinisekisa ukuba ii-wafers zakho zigcinwe ngokukhuselekileyo kwaye zithuthwa, zigcina ingqibelelo yazo kwinqanaba ngalinye.
UkuKhuselwa okuPhakamileyo kunye noKuhlala ixesha elideIIkhasethi yeSemiconductorukusuka kwiSemicera yakhelwe ukunika ukhuseleko oluphezulu kwii-wafers zakho. Yakhiwe ngezinto ezomeleleyo, ezinganyangekiyo kungcoliseko, ikhusela iiwari zakho kumonakalo onokubakho kunye nongcoliseko, iyenza ibe lolona khetho lufanelekileyo kwindawo ecocekileyo yegumbi. Uyilo lwekhasethi lunciphisa ukuveliswa kwezinto kwaye luqinisekisa ukuba iiwafa zihlala zingachukunyiswanga kwaye zikhuselekile ngexesha lokuphatha nokuthutha.
Uyilo olomeleziweyo lokuSebenza ngokuNgconoIiSemicera'sIkhasethi yeSemiconductoribonisa uyilo oluyinjineli ngobuchule olubonelela ngolungelelwaniso lwewafer oluchanekileyo, lunciphisa umngcipheko wokungalungelelani kakuhle kunye nomonakalo womatshini. Iindawo zokubeka ikhasethi zibekwe ngokugqibeleleyo ukubamba iwafa nganye ngokukhuselekileyo, ukuthintela nayiphi na intshukumo enokubangela imikrwelo okanye ezinye iziphene.
Ukuguquguquka kunye nokuhambelanaIIkhasethi yeSemiconductoriyaguquguquka kwaye iyahambelana nobukhulu obahlukeneyo bewafer, iyenza ilungele izigaba ezahlukeneyo zokwenza isemiconductor. Nokuba usebenza ngemilinganiselo yewafer esemgangathweni okanye yesiko, le khasethi iyaziqhelanisa neemfuno zakho, inikezela ngokuguquguquka kwiinkqubo zakho zokuvelisa.
UkuPhathwa okuLungileyo kunye nokusebenza ngokuSebenzayoIyilwe kunye nomsebenzisi engqondweni, iIkhasethi yeSemiconductor yeSemiceraIkhaphukhaphu kwaye kulula ukuyiphatha, ivumela ukulayishwa okukhawulezileyo kunye nokusebenza kakuhle kunye nokothula. Olu yilo lwe-ergonomic alugcini nje ixesha kodwa lunciphisa umngcipheko wempazamo yomntu, luqinisekisa ukusebenza kakuhle ngaphakathi kwendawo yakho.
Imigangatho yoShishino lweNtlanganisoI-Semicera iqinisekisa ukubaIkhasethi yeSemiconductorihlangabezana neyona migangatho iphezulu yoshishino lomgangatho nokuthembeka. Ikhasethi nganye ivavanywa ngokuqatha ukuqinisekisa ukuba isebenza ngokungaguqukiyo phantsi kweemeko ezifunekayo zokwenziwa kwe-semiconductor. Oku kuzinikezela kumgangatho kuqinisekisa ukuba iiwafi zakho zihlala zikhuselwe, zigcina imigangatho ephezulu efunekayo kwishishini.
Izinto | Imveliso | Uphando | Dummy |
Iiparamitha zeCrystal | |||
Iipolytype | 4H | ||
Imposiso yokuma kumphezulu | <11-20>4±0.15° | ||
Iiparamitha zoMbane | |||
I-Dopant | n-uhlobo lweNitrojeni | ||
Ukuxhathisa | 0.015-0.025ohm · cm | ||
Iiparamitha zoomatshini | |||
Ububanzi | 150.0±0.2mm | ||
Ukutyeba | 350±25 μm | ||
Ukuqhelaniswa neflethi ephambili | [1-100] ± 5 ° | ||
Ubude beflethi bokuqala | 47.5±1.5mm | ||
Iflethi yesibini | Akukho nanye | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Ukuqubuda | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
I-Wap | ≤35 μm | ≤45 μm | ≤55 μm |
Ngaphambili(Si-face) uburhabaxa(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Ulwakhiwo | |||
Ukuxinana kweMibhobho | <1 iya/cm2 | <10 i/cm2 | <15 i/cm2 |
Ukungcola kwesinyithi | ≤5E10athom/cm2 | NA | |
I-BPD | ≤1500 i-ea/cm2 | ≤3000 nge-cm2 | NA |
TSD | ≤500 i/cm2 | ≤1000 nge-cm2 | NA |
Umgangatho wangaphambili | |||
Ngaphambili | Si | ||
Ukugqitywa komphezulu | Si-ubuso CMP | ||
Amacandelo | ≤60ea/wafer (ubukhulu≥0.3μm) | NA | |
Imikrwelo | ≤5ea/mm. Ubude obongezelekayo ≤Ububanzi | Ubude obongezelekayo≤2*Ububanzi | NA |
Amaxolo e-orenji/imingxuma/amabala/imivimbo/ iintanda/ungcoliseko | Akukho nanye | NA | |
Iitshiphusi ze-Edge/i-idents/fracture/hex plates | Akukho nanye | ||
Iindawo zePolytype | Akukho nanye | Indawo eyongezelekayo≤20% | Indawo eyongezelekayo≤30% |
Ukumakishwa kwelaser yangaphambili | Akukho nanye | ||
Umgangatho wasemva | |||
Emva kokugqiba | C-ubuso CMP | ||
Imikrwelo | ≤5ea/mm,Ubude obongezelekayo≤2*Ububanzi | NA | |
Iziphene zangasemva (iitshiphusi zomphetho/iindindi) | Akukho nanye | ||
Umqolo uburhabaxa | Ra≤0.2nm (5μm*5μm) | ||
Ukumakishwa kwelaser yangasemva | 1 mm (ukusuka kumphetho ophezulu) | ||
Edge | |||
Edge | Chamfer | ||
Ukupakishwa | |||
Ukupakishwa | I-Epi ilungele ukupakishwa kwevacuum Ukupakishwa kweekhasethi ezininzi | ||
*Amanqaku: "NA" ithetha ukuba akukho sicelo Izinto ezingakhankanywanga zinokubhekisa kwi-SEMI-STD. |