RTP CVD SiC Ring

Inkcazelo emfutshane:

Amakhonkco e-RTP CVD SiC ikakhulu aqulunqwe nge-silicon carbide (SiC), ukwakheka kweekhemikhali kunye nokwakheka kwekristale kukunika ukusebenza okugqwesileyo. I-Silicon carbide yinto ye-ceramic enendawo ephezulu yokunyibilika, ubunzima obuphezulu kunye nokumelana nokugqwesa okugqwesileyo. Ibonisa ukuhanjiswa kakuhle kwe-thermal kunye nokuzinza kweekhemikhali kumaqondo obushushu aphezulu, kwaye inamandla amakhulu omatshini kunye nokumelana nokunxiba.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Kutheni iSilicon Carbide Etching Ring?

RTPamakhonkco e-CVD SiCzisetyenziswa kakhulu kwiindawo zoshishino kunye nezenzululwazi kumaqondo obushushu aphezulu kunye neendawo ezingcolisayo. Idlala indima ebalulekileyo kwimveliso ye-semiconductor, i-optoelectronics, umatshini ochanekileyo kunye noshishino lweekhemikhali. Usetyenziso oluthile lubandakanya:

1. Ukwenziwa kweSemiconductor:RTP CVD SiC amakhonkcoingasetyenziselwa ukufudumeza kunye nokupholisa izixhobo ze-semiconductor, ukubonelela ngolawulo oluzinzileyo lokushisa kunye nokuqinisekisa ukuchaneka kunye nokuhambelana kwenkqubo.

2. I-Optoelectronics: Ngenxa ye-conductivity egqwesileyo ye-thermal kunye nokumelana nokushisa okuphezulu, i-RTPamakhonkco e-CVD SiCinokusetyenziswa njengenkxaso kunye nezixhobo zokulahla ubushushu kwiilaser, izixhobo zonxibelelwano zefiber optic kunye namacandelo optical.

3. Umatshini ochanekileyo: I-RTP CVD SiC rings ingasetyenziselwa izixhobo ezichanekileyo kunye nezixhobo kwiqondo lokushisa eliphezulu kunye neendawo ezinobungozi, ezifana nezithando zokushisa eziphezulu, izixhobo ze-vacuum kunye neekhemikhali ze-reactors.

4. Ishishini leMichiza: Ngenxa yokumelana nokubola kunye nokuzinza kweekhemikhali, i-RTP CVD i-SiC rings ingasetyenziselwa kwiibhokisi, imibhobho kunye ne-reactors kwi-chemical reactions kunye neenkqubo ze-catalytic.

Inkqubo ye-Epi

Inkqubo ye-RTP

Inkqubo yeCVD

Ukusebenza kwemveliso:

1. Dibana nenkqubo engaphantsi kwe-28nm

2. Super umhlwa ukumelana

3. Ukusebenza okucocekileyo kakhulu

4. Ubunzima obukhulu

5. Ukuxinana okuphezulu

6. Ukumelana nobushushu obuphezulu

7. Ukunxiba ukuxhathisa

Ukusetyenziswa kwemveliso:

Izinto ze-silicon ze-carbide zineempawu zobunzima obuphezulu, ukuxhatshazwa kokugqoka, ukuxhathisa kwe-corrosion kunye nokuzinza okuphezulu kweqondo lokushisa. Iimveliso ezinomsebenzi obalaseleyo obanzi zisetyenziswa ngokubanzi kwi-etching eyomileyo kunye neenkqubo ze-TF / Diffusion.