II-Quartz Glass Pedestalukusuka kwi-Semicera yenzelwe ngokucokisekileyo usetyenziso oluphezulu kwimveliso ye-semiconductor kunye namashishini anxulumeneyo. Yenziwe ukusukaiquartz yococeko oluphezulu, le pedestal iqinisekisa uzinzo olukhethekileyo lwe-thermal kunye nokuchasana okugqwesileyo kwiikhemikhali, okwenza kube yinto efanelekileyo kwiindawo ezifunayo.
I-quartz pedestal yethu ibonelela ngenkxaso ethembekileyo ngexesha leenkqubo ezibalulekileyo ezifana ne-LPCVD (i-Low-Pressure Chemical Vapor Deposition) kunye nokusabalalisaiqhekezana lesonkainkqubo. Ngomgangatho wayo ophezulu, iglasi ye-silica edityanisiweyo esetyenziswa kulwakhiwo lweziseko zethu iyayinciphisa imingcipheko yongcoliseko, iqinisekisa intembeko yeemveliso zakho.
KwaSemicera, sizimisele ukubonelela ngeemveliso ezikumgangatho ophezulu ezihlangabezana nemigangatho engqongqo yoshishino. YethuI-Quartz Glass Pedestalyenzelwe ukuxhasa iinkqubo ezahlukeneyo ngempumelelo ngelixa igcina ukuqina kunye nokuthembeka. Nokuba yeyophando, uphuhliso, okanye imveliso, le pedestal licandelo elibalulekileyo lokufumana iziphumo ezigqwesileyo kwimisebenzi yakho.
siyakuqonda ukubaluleka kwezinto ezisemgangathweni kwintsimi ye-semiconductor. Amacandelo ethu eglasi yequartz adityanisiweyo awahlali nje ixesha elide kodwa anexabiso lokhuphiswano. I-quartz edityanisiweyo esetyenziswe kwiziseko zethu inikezela ukusebenza kakuhle, iyenza ibe lukhetho olukhethwayo kwiingcali ezijonga ukuthembeka ngaphandle kokuthomalalisa kumgangatho.
Izinto eziluncedo kwi-Fused Quartz Material
1.Ukumelana nobushushu obuphezulu
I-Fused Quartz Pedestal iqhayisa kwindawo yokuthamba emalunga ne-1730°C, iyivumela ukuba imelane nokusetyenziswa ixesha elide kumaqondo obushushu asuka kwi-1100°C ukuya kwi-1250°C. Ngaphaya koko, inokunyamezela ukuchatshazelwa kwexesha elifutshane kumaqondo obushushu afikelela kuma-1450°C.
2.Ukunyangwa kokuNgxwala
I-Fused Quartz Pedestal ayisebenzi ngokwekhemikhali kwiiasidi ezininzi, ngaphandle kwe-hydrofluoric acid. Ukuxhathisa kwayo ngeasidi ukodlula oko kweceramic ngamaxesha angama-30 kunye nentsimbi engatyiwayo ngamaxesha angama-150. Kwiqondo lokushisa eliphakamileyo, akukho nanye into enokuthi ihambelane nokuzinza kweekhemikhali ze-quartz edibeneyo, okwenza kube lukhetho olufanelekileyo kwiimeko zemichiza enzima.
3. Ukuzinza kweThermal
Enye yeempawu ezibalaseleyo zeFused Quartz Pedestal kukwandiswa kwayo okuncinci kwe-thermal coefficient. Le propati ivumela ukuba imelane nokutshintsha kweqondo lokushisa elibi ngaphandle kokuqhekeka. Ngokomzekelo, inokufudumeza ngokukhawuleza kwi-1100 ° C kwaye emva koko ifakwe emanzini kwindawo yokushisa ngaphandle kokugcina umonakalo-impawu ebalulekileyo kwiinkqubo zokuvelisa uxinzelelo oluphezulu.
