PECVD Umthwali

Intshayelelo yesithwali se-wafer

umthwali we-wafer
umthwali we-wafer
umthwali we-wafer

IKHATAGORY YOMVELISO

Inkqubo ye-Wafer Carrier ye-PECVD kunye neNkqubo ye-TALOX
• I-PECVD & TALOX Isikhephe seGraphite (M4~M12)
• Iphenyane elithe nkqo i-SM (M4, M6)
• Implantshi kunye neshawari yeGraphite Part (M4~M6)
• I-C/C yeTreyi kunye neCeramic Coating
• I-Metal i-RIE-Tray kunye ne-Ceramic Coating
• Ukutywinwa kweVacuum : O-Ring & SQ-Ring
 
Uthungelwano kunye neNkqubo yokuTshintshela i-Etching emanzi
• I-LSC H-Carrier okanye ikhasethi (M4~M12)
• I-LSC V-Carrier okanye ikhasethi (M4~M12)
• Umthwali we-ASC okanye ikhasethi (M4, M6)
• Umthwali we-W/F kunye neBhokisi yokuGcina (M4~M12)
• Uthotho lwevili lezoThutho (iRola).
 
Isithwali seeSeli zeSola kunye nesiThuthi seMetal
• Umthwali we-TRC okanye ikhasethi (M4~M12)
• Imagazini (eneBELT)
I-GRAPHITE BOAT (H-Type)19P6-216CT (WF M4~M12)

I-GRAPHITE BOAT (H-Uhlobo)

I-19P6-216CT (WF M4~M12)

I-GRAPHITE BOAT (H-Type)21P6-240CT WF M4~M12)

I-GRAPHITE BOAT (H-Uhlobo)

21P6-240CT WF M4~M12)

I-GRAPHITE BOAT (H-Type)23P7-308CT(W/F M4~M12)

I-GRAPHITE BOAT (H-Uhlobo)

23P7-308CT(W/F M4~M12)

I-GRAPHITE BOAT (H-Type)22P/7-294TP (W/F M4~M12)

I-GRAPHITE BOAT (H-Uhlobo)

22P/7-294TP (W/F M4~M12)

ISIKHIPHA SE-GRAPHITE (H-1ype)

I-GRAPHITE BOAT (H-Uhlobo)

I-W182-22P7-294CT (W/F M12)

I-W182-21P6-240CT (W/F M12)

IBHOKISI YOMNTU WF & YOKUGCINA (~M12) (1)

IBHOKISI YOMNTU WF & NOKUGCINA (~M12)

Umfanekiso we-12页-106

C/C ITHREY okanye CARRIER( M4~M10)

ISIKHIPHA ESINQONGILEYO (LP2)M6

C/C ITHREY okanye CARRIER( M4~M10)

ISIKHIPHA ESINQONGILEYO (SM) M6

ISIKHIPHA ESINQONGILEYO (SM) M6

I-LSC-H-CARRIER(~M12)

I-LSC-H-CARRIER(~M12)

I-LSC-V-CARRIER(~M12)

I-LSC-V-CARRIER(~M12)

I-LSC-V-CARRIER(~M12)

I-ASC CARRIER (~M6)

I-TRC CARRIER(~M12)

I-TRC CARRIER(~M12)

I-TRC CARRIER(~M12)

I-TRC CARRIER(~M12)

ISIKHETHI SE-GRAFITI(M12)

ISIKHETHI SE-GRAFITI(M12)

Inkqubo yeWafer Carrier yeNkqubo ye-PECVD

Inkqubo yeWafer Carrier
Inkqubo yeWafer Carrier
Inkqubo yeWafer Carrier
▶ I-GRAPHITE BOAT (CT-Designed) M10/M12 Inkqubo
• INGQONDO YOYILO EYODWA
▶ I-GRAPHITE BOAT (CT-Yenziwe) iM4/M6 Inkqubo
I-BOAT Accessory Parts

▶ Izixhobo zokuncedisa iphenyane

Umfanekiso we-13页-130
Iphini yeSikhokelo : Imveliso yoYilo lwePatent
微信截图_20241220165538
▶ ISIKHIPHA ESINQO-161.7mm IWAFER
微信截图_20241220172323
▶ ISIKHIPHA ESINQO-166mm IWAFER
微信截图_20241220172430
▶ ISIKHIPHA ESINQO-161.7mm, i-166mm WAFER
微信截图_20241220172217

Umthwali weeSeli zeSola kunye noMthwali we-Metal TRC

UHLOBO : Ukuzenzekela
 
UBUKHULU BEWAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
 
UKUSETYENZISWA : Yiphathe (ikhasethi)
 
ISAZISO : 100 sheet
 
PITCH: 4.76MM/5.953mm/6.35mm
 
UMLINGANISO : Malunga ne-559×220×220MM
Malunga 712×260×260MM
 
I-ADVANTAGE : Umoya
 
IZINTO : ILAMATANGA, ICANDELO IBHA-Aluminiyam (ianodizing)
Ipleyiti Ecaleni-POM (Antistatic)
Isigqubuthelo sebar esezantsi-EPDM/PU/VITON (ASE)
Umfanekiso we-15页-145

I-TRC-METAL CARRIER (UMNXA WOMSEBENZI)

Umfanekiso we-15页-147

I-TRC-METAL CARRIER (UMNXA WOMSEBENZI)

Umfanekiso we-15页-146

I-TRC-METAL CARRIER (UMNXA WOMSEBENZI)

Umfanekiso we-15页-157
Umfanekiso we-15页-156
Umfanekiso we-15页-155

Ipleyiti yokuhlamba kunye ne-IMPLANT, UMPHATHI

微信截图_20241220174434