Intshayelelo yesithwali se-wafer
IKHATAGORY YOMVELISO
▶Inkqubo ye-Wafer Carrier ye-PECVD kunye neNkqubo ye-TALOX
• I-PECVD & TALOX Isikhephe seGraphite (M4~M12)
• Iphenyane elithe nkqo i-SM (M4, M6)
• Implantshi kunye neshawari yeGraphite Part (M4~M6)
• I-C/C yeTreyi kunye neCeramic Coating
• I-Metal i-RIE-Tray kunye ne-Ceramic Coating
• Ukutywinwa kweVacuum : O-Ring & SQ-Ring
▶Uthungelwano kunye neNkqubo yokuTshintshela i-Etching emanzi
• I-LSC H-Carrier okanye ikhasethi (M4~M12)
• I-LSC V-Carrier okanye ikhasethi (M4~M12)
• Umthwali we-ASC okanye ikhasethi (M4, M6)
• Umthwali we-W/F kunye neBhokisi yokuGcina (M4~M12)
• Uthotho lwevili lezoThutho (iRola).
▶Isithwali seeSeli zeSola kunye nesiThuthi seMetal
• Umthwali we-TRC okanye ikhasethi (M4~M12)
• Imagazini (eneBELT)
I-GRAPHITE BOAT (H-Uhlobo)
I-19P6-216CT (WF M4~M12)
I-GRAPHITE BOAT (H-Uhlobo)
21P6-240CT WF M4~M12)
I-GRAPHITE BOAT (H-Uhlobo)
23P7-308CT(W/F M4~M12)
I-GRAPHITE BOAT (H-Uhlobo)
22P/7-294TP (W/F M4~M12)
I-GRAPHITE BOAT (H-Uhlobo)
I-W182-22P7-294CT (W/F M12)
I-W182-21P6-240CT (W/F M12)
IBHOKISI YOMNTU WF & NOKUGCINA (~M12)
C/C ITHREY okanye CARRIER( M4~M10)
C/C ITHREY okanye CARRIER( M4~M10)
ISIKHIPHA ESINQONGILEYO (SM) M6
I-LSC-H-CARRIER(~M12)
I-LSC-V-CARRIER(~M12)
I-ASC CARRIER (~M6)
I-TRC CARRIER(~M12)
I-TRC CARRIER(~M12)
ISIKHETHI SE-GRAFITI(M12)
Inkqubo yeWafer Carrier yeNkqubo ye-PECVD
▶ I-GRAPHITE BOAT (CT-Designed) M10/M12 Inkqubo
• INGQONDO YOYILO EYODWA
▶ I-GRAPHITE BOAT (CT-Yenziwe) iM4/M6 Inkqubo
▶ Izixhobo zokuncedisa iphenyane
▶ ISIKHIPHA ESINQO-161.7mm IWAFER
▶ ISIKHIPHA ESINQO-166mm IWAFER
▶ ISIKHIPHA ESINQO-161.7mm, i-166mm WAFER
Umthwali weeSeli zeSola kunye noMthwali we-Metal TRC
UHLOBO : Ukuzenzekela
UBUKHULU BEWAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
UKUSETYENZISWA : Yiphathe (ikhasethi)
ISAZISO : 100 sheet
PITCH: 4.76MM/5.953mm/6.35mm
UMLINGANISO : Malunga ne-559×220×220MM
Malunga 712×260×260MM
I-ADVANTAGE : Umoya
IZINTO : ILAMATANGA, ICANDELO IBHA-Aluminiyam (ianodizing)
Ipleyiti Ecaleni-POM (Antistatic)
Isigqubuthelo sebar esezantsi-EPDM/PU/VITON (ASE)