Kwindawo yokuvelisa i-semiconductor, iSiC Paddleidlala indima ebalulekileyo, ngakumbi kwinkqubo yokukhula kwe-epitaxial. Njengenxalenye ephambili esetyenziswa kwiMOCVD(iMetal Organic Chemical Vapor Deposition) iinkqubo,IiPaddles zeSiCzenzelwe ukunyamezela amaqondo obushushu aphezulu kunye nemo engqongileyo eyingozi ngokwekhemikhali, nto leyo ezenza zibe yimfuneko kwimveliso ephezulu. Kwi-Semicera, sisebenza ngokukhethekileyo ekuveliseni ukusebenza okuphezuluIiPaddles zeSiCyenzelwe zombiniYiyo EpitaxykwayeSiC Epitaxy, enika ukuqina okukhethekileyo kunye nokuzinza kwe-thermal.
Ukusetyenziswa kwe-SiC Paddles kuxhaphake ngokukodwa kwiinkqubo ezifana nokukhula kwe-epitaxial, apho i-substrate idinga iimeko ezichanekileyo ze-thermal kunye neekhemikhali. Iimveliso zethu zeSemicera ziqinisekisa ukusebenza ngokugqibeleleyo kwiindawo ezifuna aI-MOCVD Susceptor, apho iindawo eziphezulu ze-silicon carbide zifakwe kwii-substrates. Oku kunegalelo ekuphuculeniiqhekezana lesonkaumgangatho kunye nokusebenza okuphezulu kwesixhobo kwimveliso ye-semiconductor.
IiSemicera'sIiPaddles zeSiCayenzelwanga kuphelaYiyo Epitaxykodwa ilungiselelwe uluhlu lwezinye izicelo ezibalulekileyo. Ngokomzekelo, ziyahambelana ne-PSS Etching Carriers, eyimfuneko ekuvelisweni kwee-wafers ze-LED, kwayeAbathwali be-ICP Etching, apho ulawulo lwe-ion oluchanekileyo luyimfuneko ekubunjweni kweewafers. Ezi paddles zibalulekile kwiinkqubo ezifanaAbathwali be-RTP(I-Rapid Thermal Processing), apho imfuno yokutshintsha kweqondo lokushisa ngokukhawuleza kunye ne-conductivity ephezulu ye-thermal ibaluleke kakhulu.
Ukongeza, ii-SiC Paddles zisebenza njenge-LED Epitaxial Susceptors, iququzelela ukukhula kwee-wafers ze-LED ezisebenza kakuhle. Ukukwazi ukuphatha ubushushu obahlukeneyo kunye noxinzelelo lokusingqongileyo kubenza baguquguquke kakhulu kwiinkqubo ezahlukeneyo zokwenziwa kwe-semiconductor.
Ngokubanzi, i-Semicera izibophelele ekuhambiseni ii-SiC Paddles ezihlangabezana neemfuno ezichanekileyo zokwenza i-semiconductor yanamhlanje. Ukusuka kwi-SiC Epitaxy ukuya kwi-MOCVD Susceptors, izisombululo zethu ziqinisekisa ukuthembeka okuphuculweyo kunye nokusebenza, ukulungiselela iimfuno zokusika zeshishini.
Ixesha lokuposa: Sep-07-2024