Yintoni i-Epi Pan Carrier?

Ishishini le-semiconductor lixhomekeke kwizixhobo ezikhethekileyo ukuvelisa izixhobo zombane ezikumgangatho ophezulu. Elinye icandelo elibaluleke kangaka kwinkqubo yokukhula kwe-epitaxial yi-epi pan carrier. Esi sixhobo sidlala indima ebalulekileyo ekubekweni kwee-epitaxial layers kwi-semiconductor wafers, ukuqinisekisa ukufana kunye nomgangatho wemveliso yokugqibela.

I-epi pan carrier, eyaziwa ngokuba yi-epitaxy pan carrier, yitreyi eyilwe ngokukodwa esetyenziswa kwinkqubo yokukhula kwe-epitaxial. Ibamba kwaye ixhase iiwafers ze-semiconductor ngexesha lokubekwa kwee-epitaxial layers. Ezi zithwali zenzelwe ukujamelana namaqondo okushisa aphezulu kunye neendawo ezinobungozi eziqhelekileyo zeenkqubo ze-epitaxial, ukubonelela ngeqonga elizinzile lokukhula kwe-single-crystal layers.

Izixhobo kunye noLwakhiwo:

Abathwali be-Epi pan ngokwesiqhelo benziwa ngezinto ezikwaziyo ukunyamezela amaqondo obushushu agqithisileyo kwaye ziyakwazi ukumelana neekhemikhali. Izinto eziqhelekileyo ziquka:

•I-Silicon Carbide (SiC): Eyaziwa ngokuba yi-thermal conductivity ephezulu kunye nokuchasana nokunxiba kunye ne-oxidation, i-SiC lukhetho oludumileyo lwabathwali be-epi pan.

• Igraphite: Isetyenziswa rhoqo ngenxa yeempawu zayo ezibalaseleyo zobushushu kunye nokukwazi ukugcina imfezeko yesakhiwo kumaqondo obushushu aphezulu. Abathwali beGraphite badla ngokugqunywa ngeSiC ukomeleza ukuqina kwabo kunye nokuxhathisa ukubola.

Indima kwiNkqubo yokuKhula kwe-Epitaxial:

Inkqubo yokukhula kwe-epitaxial ibandakanya ukubekwa komgangatho obhityileyo we-crystalline material kwi-substrate okanye i-wafer. Le nkqubo ibalulekile ekudaleni izixhobo zesemiconductor ezineempawu zombane ezichanekileyo. I-epi pan carrier ixhasa i-wafer kwigumbi lokuphendula kwaye iqinisekisa ukuba ihlala izinzile ngexesha lenkqubo yokubeka.

Imisebenzi ephambili ye-epi pan carrier ibandakanya:

• Ukusasazwa koBubushushu obufanayo: Umthwali uqinisekisa ukuba ubushushu busasazeke kwi-wafer, nto leyo iyimfuneko ekuphumezeni ubungqingqwa be-epitaxial layer nomgangatho.

• I-Chemical Isolation: Ngokubonelela indawo ezinzileyo kunye ne-inert, umthwali unqanda ukuphendulwa kweekhemikhali ezingafunekiyo ezinokuthi zithobe umgangatho we-epitaxial layer.

Iinzuzo zoMgangatho oPhezuluEpi Pan Abathwali:

• Ukuphuculwa kokuSebenza kweSixhobo: Iileya ze-epitaxial ezifanayo zifaka isandla ekusebenzeni okuphezulu kwezixhobo ze-semiconductor, ezikhokelela ekusebenzeni kakuhle kunye nokuthembeka.

• Ukwandiswa kweSivuno: Ngokunciphisa iziphene kunye nokuqinisekisa ukubekelwa phantsi okufanayo, abathwali abakumgangatho ophezulu baphucula isivuno se-wafers ye-semiconductor esebenzisekayo.

• Iindleko eziNcitshisiweyo zokuLondoloza: Izinto ezihlala ixesha elide kunye nobunjineli obuchanekileyo zinciphisa imfuno yokutshintshwa rhoqo kunye nokugcinwa, ukwehlisa iindleko zemveliso zizonke.

I-epi pan carrier iyinxalenye ebalulekileyo kwinkqubo yokukhula kwe-epitaxial, ichaphazela ngokuthe ngqo umgangatho kunye nokuhambelana kwezixhobo ze-semiconductor. Ngokukhetha izinto ezifanelekileyo kunye noyilo, abavelisi banokwandisa inkqubo ye-epitaxial, ekhokelela ekusebenzeni okuphuculweyo kwesixhobo kunye nokunciphisa iindleko zokuvelisa. Njengoko imfuno yezixhobo zombane eziphambili zikhula, ukubaluleka komgangatho ophezuluepi pan abathwalikwishishini le-semiconductor liyaqhubeka ukwanda.