Yintoni i-Epi Carrier?

Ukuphonononga indima yayo ebalulekileyo kwi-Epitaxial Wafer Processing

Ukuqonda ukubaluleka kwe-Epi Carriers kwi-Advanced Semiconductor Manufacturing

Kwishishini le-semiconductor, ukuveliswa kwekhwalithi ephezulu ye-epitaxial (epi)amaqebengwanalinyathelo elibalulekileyo kwizixhobo zokuvelisa ezifana neetransistors, iidiode, kunye namanye amacandelo e-elektroniki. Okungundoqo kule nkqubo kukuepi carrier, isixhobo esikhethekileyo esenzelwe ukubamba ii-wafers ngokukhuselekileyo ngexesha le-epitaxial deposition. Kodwa yintoni kanye kanye i-epi carrier, kwaye kutheni ibaluleke kangaka ekwenzeni i-semiconductor?

Ukukhula kwe-Epitaxial: Inkqubo ePhambili kwi-Semiconductor Fabrication

Ukukhula kwe-Epitaxial, okanye i-epitaxy, ibhekisa kwinkqubo yokubeka umaleko obhityileyo we-crystalline material kwi-wafer ye-semiconductor. Lo maleko, owaziwa ngokuba yi-epitaxial layer, une-crystal orientation efanayo njenge-substrate engaphantsi kwaye isetyenziselwa ukunyusa iimpawu zombane ze-wafer. I-Epitaxy ibalulekile ekudaleni izixhobo zokusebenza eziphezulu ezifuna ulawulo oluchanekileyo malunga nokubunjwa kwezinto kunye nesakhiwo.

Ukufezekisa umgangatho ofunwayo kunye nokufana kwi-epitaxial layer, ii-wafers kufuneka zigcinwe ngokuchanekileyo kunye nokuzinza ngexesha lenkqubo yokubeka. Kulapho keepi carrieruyadlala.

Indima ka-Epi Carrier

An epi carriersisixhobo esiyilwe ngokukodwa esibamba iiwafers ngexesha lenkqubo yokubekwa kwe-epitaxial. Ngokuqhelekileyo yenziwe kwizinto ezicocekileyo ezinokumelana nokushisa okuphezulu kunye neendawo ezisebenzayo ezibandakanyekayo kwi-epitaxy. Uyilo lomthwali luqinisekisa ukuba ii-wafers zibekwe ngokukhuselekileyo kwaye zibonakaliswe ngokulinganayo kwizinto zokubeka, ezikhokelela kumgca we-epitaxial ofanayo kuwo wonke umphezulu we-wafer.

Omnye wemisebenzi ephambili ye-epi carrier kukugcina iyewaferuzinzo kunye nokulungelelaniswa kuyo yonke inkqubo yokubeka. Nakuphi na ukunyakaza okanye ukungahambi kakuhle kunokukhokelela kwiziphene kwi-epitaxial layer, enokuchaphazela kakhulu ukusebenza kwesixhobo sokugqibela se-semiconductor. Umthwali kufuneka kwakhona athintele ukungcoliseka kwaye aqinisekise ukuba ama-wafers ahlala ekhululekile kwiinqununu okanye ukungcola ngexesha lokucubungula.

NgobaEpi AbathwaliZibalulekile kwiSemiconductor Manufacturing

Umgangatho we-epitaxial layer ichaphazela ngokuthe ngqo ukusebenza kwezixhobo ze-semiconductor. Ngaloo ndlela, indima yomthwali we-epi ibalulekile ekuphumezeni imigangatho ephezulu efunekayo kushishino. Ngokubonelela ngemeko ezinzileyo kunye nokulawulwa kwe-wafer processing, i-epi carrier iqinisekisa ukuba i-epitaxial layer ifakwe ngokufanayo kwaye ingenaziphene.

Abathwali be-Epi nabo bayimfuneko ekuxhaseni ukunyuswa kokwenziwa kwe-semiconductor. Njengoko iijometri zesixhobo ziqhubeka nokuncipha kunye nemfuno yokusebenza ephezulu ikhula, imfuno yeenkqubo ezichanekileyo nezithembekileyo ze-epitaxial iba baluleke ngakumbi. Abathwali be-epi abakumgangatho ophezulu banceda abavelisi ukuba bafezekise ezi mfuno ngokuvumela iziphumo ezingaguquguqukiyo nezinokuphinda ziphindaphindeke, nanjengoko imveliso isonyuka.

Ukuqukumbela

Isishwankathelo, umthwali we-epi sisixhobo esiyimfuneko kwinkqubo yokwenziwa kwe-semiconductor, ngakumbi kwimveliso yee-epitaxial wafers. Indima yayo ekuqinisekiseni uzinzo lwe-wafer, ukulungelelaniswa, kunye nolawulo longcoliseko lubalulekile ekufezekiseni iileya ze-epitaxial ezikumgangatho ophezulu ezifunekayo kwizixhobo eziphambili ze-semiconductor. Njengoko ishishini liqhubeka nokutyhala imida yetekhnoloji, ukubaluleka kwabathwali be-epi abathembekileyo nabasebenzayo kuya kwanda kuphela, kubenze babe yinxalenye ebalulekileyo ekufuneni ukugqwesa kwimveliso ye-semiconductor.

Kwabo bakwishishini le-semiconductor bajonge ukwandisa iinkqubo zabo ze-epitaxial, ukuqonda kunye notyalo-mali kubathwali be-epi abakumgangatho ophezulu linyathelo elibalulekileyo ekufumaneni iziphumo ezingcono kunye nokugcina umda wokukhuphisana kwimarike.