Indlela yokulungiselela iindawo eziqhelekileyo ezigqunywe yi-TaC yegraphite

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Indlela ye-CVD (i-Chemical Vapor Deposition):
Ku-900-2300℃, usebenzisa i-TaCl₅kunye ne-CnHm njengemithombo ye-tantalum kunye nekhabhoni, i-H₂ njengokunciphisa umoya, i-Ar₂ njenge-carrier carrier, ifilimu yokuphendula. Ingubo elungiselelwe i-compact, iyunifomu kunye nokucoceka okuphezulu. Nangona kunjalo, kukho iingxaki ezifana nenkqubo enzima, ixabiso elibizayo, ukulawulwa kokuhamba komoya okunzima kunye nokusebenza kakuhle kokubekwa.
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Indlela yokucoca uludaka:
I-slurry equkethe umthombo wekhabhoni, umthombo we-tantalum, i-dispersant kunye ne-binder ifakwe kwi-graphite kwaye ifakwe kwiqondo lokushisa eliphezulu emva kokumisa. Ingubo elungiselelwe ikhula ngaphandle kokuqhelaniswa rhoqo, ineendleko eziphantsi kwaye ifanelekile kwimveliso enkulu. Kuhlala kuphononongwa ukuze kuphunyezwe ukugquma okufanayo kunye nokugcwala ngokupheleleyo kwigraphite enkulu, ukuphelisa iziphene zenkxaso kunye nokuphucula amandla okudibanisa okugqumayo.
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Indlela yokutshiza ngeplasma:
I-TaC powder inyibilikiswa yi-plasma arc kubushushu obuphezulu, i-atom ibe ngamathontsi obushushu obuphezulu ngejethi enesantya esiphezulu, kwaye itshizwe kumphezulu wemathiriyeli yegraphite. Kulula ukwenza umaleko we-oxide phantsi kwe-non-vacuum, kwaye ukusetyenziswa kwamandla kukhulu.

 

Umfanekiso . I-wafer tray emva kokusetyenziswa kwi-GaN epitaxial ekhulile isixhobo se-MOCVD (Veeco P75). Le ingasekhohlo igqunywe nge-TaC kwaye esekunene iqatywe ngeSiC.

I-TaC iqatyweiindawo zegraphite kufuneka zisonjululwe

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Amandla okubopha:
I-coefficient yokwandiswa kwe-thermal kunye nezinye iipropati ezibonakalayo phakathi kwe-TaC kunye ne-carbon materials zahlukile, amandla okubopha i-coating aphantsi, kunzima ukunqanda iintanda, ii-pores kunye noxinzelelo lwe-thermal, kwaye ukugquma kulula ukukrazula kwi-atmosphere yokwenyani equkethe ukubola kunye nokubola. inkqubo yokunyuka nokupholisa ngokuphindaphindiweyo.
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Ubunyulu:
TaC ukutyabekakufuneka ibe yi-ultra-high purity ukuphepha ukungcola kunye nokungcola phantsi kweemeko eziphezulu zokushisa, kunye nemigangatho esebenzayo yomxholo kunye nemigangatho yeempawu zekhabhoni yamahhala kunye nokungcola kwangaphakathi kumphezulu kunye nangaphakathi kwengubo epheleleyo kufuneka kuvunyelwene.
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Uzinzo:
Ukumelana nobushushu obuphezulu kunye nokuxhathisa umoya wekhemikhali ngaphezu kwe-2300 ℃ zezona zibonakaliso zibalulekileyo zokuvavanya ukuzinza kwengubo. Imingxunya, ii-cracks, iikona ezilahlekileyo, kunye nemida yengqolowa yokuqhelaniswa enye kulula ukubangela ukuba iigesi ezitshabalalisayo zingene kwaye zingene kwi-graphite, okubangelwa ukusilela kokukhusela i-coating.
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Ukuxhathisa kwi-oxidation:
I-TaC iqala uku-oxidize ukuya kwi-Ta2O5 xa ingaphezulu kwe-500℃, kwaye izinga le-oxidation linyuka ngokukhawuleza ngokunyuka kobushushu kunye noxinzelelo lwe-oxygen. I-oxidation yomhlaba iqala ukusuka kwimida yeenkozo kunye neenkozo ezincinci, kwaye ngokuthe ngcembe zenza iikristale zekholomu kunye neekristali eziphukileyo, ezikhokelela kwinani elikhulu lezikhala kunye nemingxuma, kunye nokungena kwe-oksijini kuqinisa kuze kube yilapho i-coating ihluthwa. Isiphumo somaleko weoksidi sinokuhanjiswa kakuhle kwe-thermal kunye neentlobo ngeentlobo zemibala ngenkangeleko.
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Ukufana kunye noburhabaxa:
Ukusabalalisa okungafaniyo kwendawo yokugubungela kunokukhokelela ekugxininiseni kwe-thermal yendawo, ukwandisa umngcipheko wokuqhekeka kunye ne-spalling. Ukongeza, uburhabaxa bomphezulu buchaphazela ngokuthe ngqo intsebenziswano phakathi kwengubo kunye nokusingqongileyo kwangaphandle, kwaye uburhabaxa obuphezulu kakhulu bukhokelela ngokulula kukhuhlane olunyukayo kunye nentsimi ye-thermal engalinganiyo.
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Ubungakanani beenkozo:
Ubungakanani bengqolowa obufanayo bunceda ukuzinza kwengubo. Ukuba ubungakanani bengqolowa buncinci, ibhondi ayiqinanga, kwaye kulula ukuba i-oxidized kunye ne-corrod, ibangele inani elikhulu lokuqhekeka kunye nemingxuma kumgca wengqolowa, okunciphisa ukusebenza kokukhusela kwengubo. Ukuba ubungakanani beenkozo bukhulu kakhulu, bubunzima, kwaye ukugquma kulula ukucima phantsi koxinzelelo lwe-thermal.