Inkqubo yokukhula ye-crystal silicon enye iqhutywe ngokupheleleyo kwintsimi ye-thermal.Intsimi efanelekileyo ye-thermal inceda ekuphuculeni umgangatho wekristale kwaye inokusebenza kakuhle kwe-crystallization.Uyilo lwentsimi ye-thermal lumisela ubukhulu becala utshintsho kunye notshintsho kwi-gradients kwiqondo lokushisa kwintsimi ye-thermal.Ukuhamba kwegesi kwigumbi lesithando somlilo kunye nokwahlukana kwezinto ezisetyenziswa kwintsimi ye-thermal ngqo kunquma ubomi benkonzo yentsimi ye-thermal.Intsimi ye-thermal eyilwe ngokungekho ngqiqweni ayenzi nje ukuba kube nzima ukukhula iikristale ezihlangabezana neemfuno zomgangatho, kodwa ayikwazi ukukhula ngokupheleleyo iikristale enye phantsi kweemfuno zenkqubo ethile.Kungenxa yoko le nto umzi-mveliso we-silicon we-Czochralski monocrystalline uthatha uyilo lwentsimi ye-thermal njengetekhnoloji engundoqo kwaye utyala imali enkulu yabasebenzi kunye nezixhobo eziphathekayo kuphando lwe-thermal field kunye nophuhliso.
Inkqubo ye-thermal yenziwe ngezinto ezahlukeneyo zentsimi ye-thermal.Siza kwazisa ngokufutshane kuphela izinto ezisetyenziswa kwintsimi ye-thermal.Ngokuphathelele ukuhanjiswa kweqondo lokushisa kwintsimi ye-thermal kunye nefuthe layo ekutsaleni i-crystal, asiyi kuhlalutya apha.Izinto zentsimi ye-thermal zibhekisela kwisithando somlilo se-crystal ukukhula.Izahlulo zesakhiwo kunye ne-thermal insulated zegumbi, eziyimfuneko ukwenza ilaphu lobushushu elifanelekileyo elijikeleze i-semiconductor enyibilikayo kunye neekristale.
Nye.izixhobo zesakhiwo se-thermal field
Izinto ezisisiseko ezixhasayo zokukhulisa i-silicon enye yekristale ngendlela yeCzochralski yigraphite ecocekileyo.Izinto zegraphite zidlala indima ebaluleke kakhulu kwishishini lanamhlanje.Ekulungiseleleni i-silicon enye ye-crystal ngendlela ye-Czochralski, ingasetyenziselwa njengezixhobo zesakhiwo se-thermal field ezifana nezifudumezi, iityhubhu zesikhokelo, ii-crucibles, i-insulation tubes, kunye neetreyi ezinqamlekileyo.
Izinto zegraphite zakhethwa ngenxa yokulula kwayo ukulungiswa kwimiqulu emikhulu, ukuqhutyelwa kwenkqubo kunye neempawu zokumelana nokushisa okuphezulu.Ikhabhoni ekwimo yedayimane okanye igraphite inendawo yokunyibilika ephezulu kunayo nayiphi na into okanye ikhompawundi.Imathiriyeli yegraphite yomelele kakhulu, ngakumbi kumaqondo obushushu aphezulu, kwaye umbane wayo kunye ne-thermal conductivity nayo ilungile.I-conductivity yayo yombane yenza ukuba ifaneleke njengento yokufudumeza, kwaye ine-conductivity eyanelisayo ye-thermal engakwazi ukusabalalisa ngokulinganayo ukushisa okwenziwa ngumlilo kwi-crucible kunye nezinye iindawo ze-thermal field.Nangona kunjalo, kumaqondo obushushu aphezulu, ngakumbi kwimigama emide, eyona ndlela iphambili yokuhanjiswa kobushushu yimitha.
Amalungu egraphite aqale abunjwe ngokucinezelwa kwe-extrusion okanye i-isostatic yamasuntswana amahle ekhabhoni exutywe nesibophelelo.Iinxalenye zegraphite ezikumgangatho ophezulu zihlala zicinezelwa ngokwe-isostatically.Iqhekeza lilonke liqala lifakwe ikharbhoni kwaye emva koko lenziwe igraphiti kubushushu obuphezulu kakhulu, kufutshane ne3000°C.Amalungu omatshini asuka kula ma-monoliths ahlala ecocwe kwi-atmospheric equkethe i-chlorine kumaqondo obushushu aphezulu ukususa ukungcoliseka kwesinyithi ukuthobela iimfuno zeshishini le-semiconductor.Nangona kunjalo, kunye nokucocwa okufanelekileyo, amanqanaba okungcoliseka kwesinyithi yimiyalelo yobukhulu obuphezulu kunokuba buvunyelwe yi-silicon enye ye-crystal materials.Ngoko ke, kufuneka kuthathelwe ingqalelo kuyilo lwentsimi ye-thermal ukukhusela ukungcoliswa kwezi zixhobo ekungeneni kwi-melt okanye i-crystal surface.
Izinto zegraphite zingena kancinci, ezivumela isinyithi esisele ngaphakathi ukuba sifikelele ngokulula kumphezulu.Ukongeza, isilicon monoxide ekhoyo kwirhasi yokucoca ejikeleze umphezulu wegraphite inokungena nzulu kwizinto ezininzi kwaye isabele.
Izifudumezi zomlilo zekristale enye yangaphambili zenziwe ngeentsimbi eziphikisayo ezifana ne-tungsten kunye ne-molybdenum.Njengoko itekhnoloji yokucubungula igraphite ikhula, iipropathi zombane zoqhagamshelo phakathi kwamacandelo egraphite ziyazinza, kwaye izifudumezi zekristale enye yesilicon eziko zithathe indawo yetungsten kunye nemolybdenum kunye nezinye izifudumezi eziphathekayo.Eyona nto isetyenziswa kakhulu ngoku yigraphite isostatic.i-semicera inokubonelela ngomgangatho ophezulu wezinto zegraphite ezicinezelekileyo.
Kwi-Czochralski enye i-crystal crystal furnaces, i-C / C i-composite materials ngamanye amaxesha isetyenziswa, kwaye ngoku isetyenziselwa ukwenza iibholiti, amantongomane, ii-crucibles, iipleyiti ezithwala imithwalo kunye nezinye izinto.Ikhabhoni/ikhabhoni (c/c) imathiriyeli edityanisiweyo yi-carbon fibre eqiniswe nge-carbon-based composite materials.Banamandla athile aphezulu, imodyuli ethile ephezulu, i-coefficient yokwandisa i-thermal ephantsi, i-conductivity yombane efanelekileyo, ukuqina okukhulu kwe-fracture, umxhuzulane ophantsi okhethekileyo, ukuxhathisa ukothuka kwe-thermal, ukumelana nokubola, Inoluhlu lweepropati ezigqwesileyo ezifana nokumelana nobushushu obuphezulu kwaye ngoku ibanzi. esetyenziswa kwi-aerospace, racing, biomataerials kunye namanye amabala njengohlobo olutsha lwezixhobo ezilwa nobushushu obuphezulu.Okwangoku, eyona ngxaki iphambili ekuhlangatyezwane nayo yimathiriyeli ehlanganisiweyo yeC/C yasekhaya ziindleko kunye nemiba yoshishino.
Kukho ezinye izinto ezininzi ezisetyenziselwa ukudala iindawo ezishushu.Igraphite eyomeleziweyo yeCarbon ineempawu ezingcono zoomatshini;nangona kunjalo, ibiza kakhulu kwaye ibeka ezinye iimfuno zoyilo.I-Silicon carbide (i-SiC) yinto engcono kune-graphite ngeendlela ezininzi, kodwa kubiza kakhulu kwaye kunzima ukwenza iindawo ezinomthamo omkhulu.Nangona kunjalo, i-SiC ihlala isetyenziswa njenge-coating ye-CVD ukunyusa ubomi beendawo zegraphite ezivezwe kwigesi eyingozi ye-silicon monoxide kunye nokunciphisa ukungcoliswa kwegraphite.I-CVD eshinyeneyo ye-silicon carbide coating ikhusela ngokufanelekileyo ungcoliseko olungaphakathi kwi-microporous graphite material ukuba lufikelele kumphezulu.
Enye yi-CVD carbon, enokwenza umaleko oshinyeneyo phezu kwamalungu egraphite.Ezinye izinto ezinokumelana nobushushu obuphezulu, ezifana ne-molybdenum okanye izinto ze-ceramic ezihambelana nokusingqongileyo, zingasetyenziselwa apho kungekho mngcipheko wokungcola kwe-melted.Nangona kunjalo, iiseramics zeoksidi zinokufaneleka okulinganiselweyo ekudibaneni ngokuthe ngqo nemathiriyeli yegraphite kumaqondo obushushu aphezulu, kaninzi zishiya ezinye iindlela ezimbalwa ukuba ukugquma kuyafuneka.Enye yi-hexagonal boron nitride (ngamanye amaxesha ibizwa ngokuba yigraphite emhlophe ngenxa yeempawu ezifanayo), kodwa ineempawu ezimbi zoomatshini.I-Molybdenum ngokuqhelekileyo inengqiqo kwizicelo zokushisa okuphezulu ngenxa yeendleko zayo ezilinganiselweyo, i-diffusivity ephantsi kwiikristale ze-silicon, kunye ne-coefficient ephantsi yokwahlula, malunga ne-5 × 108, evumela ukungcoliswa kwe-molybdenum ngaphambi kokutshabalalisa isakhiwo se-crystal.
Mbini.Izinto zokufakelwa kwe-thermal field
Eyona nto isetyenziswa ngokuqhelekileyo imathiriyeli yokugquma yikhabhoni evakala ngeendlela ezahlukeneyo.Ikhabhoni evezwayo yenziwe ngeentsinga ezibhityileyo ezisebenza njenge-thermal insulation kuba zithintela ukusasazeka kwemitha ye-thermal amaxesha amaninzi kumgama omfutshane.Ikhabhoni ethambileyo evakalayo ilukwa ibe ngamashiti ezinto ezicekethekileyo, athi ke asikwe abe kwimilo enqwenelekayo kwaye agotywe ngokuqinileyo kwiradiyasi efanelekileyo.Ukuva okunyangwayo kwenziwa ngezinto zefayibha ezifanayo, kusetyenziswa i-carbon-containing binder ukudibanisa iintsinga ezisasaziweyo zibe yinto eyomeleleyo kunye nesitayile.Ukusebenzisa i-chemical vapour deposition of carbon endaweni yezibophelelo kunokuphucula iimpawu zomatshini wemathiriyeli.
Ngokuqhelekileyo, umphezulu ongaphandle we-insulating cured waziva ugqunywe nge-graphite coating eqhubekayo okanye i-foil ukunciphisa ukhukuliseko kunye nokuguga kunye nokungcoliswa kwe-particle.Ezinye iintlobo ze-carbon-based insulation materials zikhona, ezifana ne-carbon foam.Ngokubanzi, izinto ezenziwe ngegrafiti zikhethwa ngokucacileyo kuba i-graphitization inciphisa kakhulu indawo ephezulu yefiber.Ezi zixhobo zomgangatho ophezulu zivumela ukukhutshwa okuncinci kwaye kuthatha ixesha elincinci ukutsala isithando somlilo kwi-vacuum efanelekileyo.Olunye uhlobo luyi-C / C yezinto ezidibeneyo, ezineempawu ezibalaseleyo ezifana nobunzima obulula, ukunyamezela umonakalo omkhulu, kunye namandla aphezulu.Isetyenziswa kwiindawo ezishushu zokutshintsha iindawo zegraphite, ezinciphisa ngokubonakalayo ukutshintshwa kwamatyeli egrafu kunye nokuphucula umgangatho wekristale enye kunye nokuzinza kwemveliso.
Ngokohlelo lwezixhobo ekrwada, ikhabhoni ivakale inokohlulwa ibe yipolyacrylonitrile-based carbon felt, viscose-based carbon felt, kunye ne asphalt-based carbon felt.
I-polyacrylonitrile-based based carbon felt inomxholo omkhulu wothuthu, kwaye i-monofilaments iba brittle emva konyango oluphezulu lobushushu.Ngexesha lokusebenza, uthuli luveliswa ngokulula ukungcolisa indawo yesithando somlilo.Ngexesha elifanayo, iifibers zingena lula kwiipores zabantu kunye neendlela zokuphefumula, ezibangela ingozi kwimpilo yabantu;I-viscose-based carbon felt Ineempawu ezilungileyo zokugquma i-thermal, ithambile emva konyango lobushushu, kwaye ayinakwenzeka ukuba ivelise uthuli.Nangona kunjalo, i-cross-section ye-viscose-based strands inesimo esingaqhelekanga kwaye kukho imilambo emininzi kwi-fiber surface, ekulula ukuyenza phambi komoya oxidizing kwi-Czochralski single crystal silicon furnace.Iigesi ezifana ne-CO2 zibangela imvula yeoksijini kunye nezinto zekhabhoni kwizinto ze-silicon enye yekristale.Abavelisi abakhulu baquka i-SGL yaseJamani kunye nezinye iinkampani.Okwangoku, ukuvakala kwekhabhoni esekwe kwi-pitch yeyona nto isetyenziswa kakhulu kwishishini lekristale enye ye-semiconductor, kwaye ukusebenza kwayo kwe-thermal insulation ingcono kunoko kuvakala kwikhabhoni encangathi.Ikhabhoni esekwe kwintlaka ivakala iphantsi, kodwa ikharbon esekwe kwi-asphalt ivakala inobunyulu obuphezulu kunye nokukhutshwa kothuli olusezantsi.Abavelisi baquka iKureha Chemical yaseJapan, iOsaka Gas, njl.
Ekubeni imilo yekhabhoni ivakalelwa ayilungiswanga, akulula ukuyisebenzisa.Ngoku iinkampani ezininzi ziphuhlise imathiriyeli entsha yokugquma i-thermal esekwe kwi-carbon felt - ikhabhoni enyangisiweyo.Ikhabhoni enyangisiweyo ikwabizwa ngokuba yi-hard feel.Ikhabhoni ivakale enemilo ethile kunye nokuzinza emva kokuba ifakwe kwi-resin, i-laminated, iqiniswe kunye nekhabhoni.
Umgangatho wokukhula kwe-silicon enye ye-crystal ichaphazeleka ngokuthe ngqo kwindawo ye-thermal field, kunye ne-carbon fiber insulation materials idlala indima ebalulekileyo kule ndawo.I-Carbon fiber thermal insulation ethambileyo ivakala ikwinzuzo enkulu kwishishini le-photovoltaic semiconductor ngenxa yeendleko zayo, isiphumo esihle sokugquma kwe-thermal, uyilo olubhetyebhetye kunye nokumila okunokwenziwa ngokwezifiso.Ukongeza, i-carbon fiber rigid insulation ivakale iya kuba negumbi elikhulu lophuhliso kwimakethi ye-thermal field material ngenxa yamandla ayo athile kunye nokusebenza okuphezulu.Sizibophelele kuphando kunye nophuhliso kwintsimi yezinto zokufakelwa kwe-thermal kunye nokuphucula ngokuqhubekayo ukusebenza kwemveliso ukukhuthaza ukuchuma kunye nophuhliso lweshishini le-photovoltaic semiconductor.
Ixesha lokuposa: May-15-2024