I-MOCVD Susceptor yokuKhula kwe-Epitaxial

I-MOCVD Susceptor ye-Epitaxial Growth nge-semicera, isisombululo esikhokelayo esenzelwe ukunyusa inkqubo yokukhula kwe-epitaxial kwizicelo eziphambili ze-semiconductor. I-Semicera's MOCVD Susceptor iqinisekisa ulawulo oluchanekileyo kubushushu kunye nokubekwa kwezinto eziphathekayo, okwenza kube lolona khetho lufanelekileyo lokufumana umgangatho ophezulu we-Si Epitaxy kunye ne-SiC Epitaxy. Ukwakhiwa kwayo okuqinileyo kunye ne-thermal conductivity ephezulu yenza ukuba ukusebenza okuqhubekayo kwiindawo ezifunayo, ukuqinisekisa ukuthembeka okufunekayo kwiinkqubo zokukhula kwe-epitaxial.

Le Susceptor ye-MOCVD iyahambelana nezicelo ezahlukeneyo ze-epitaxial, kubandakanywa nokuveliswa kwe-Monocrystalline Silicon kunye nokukhula kwe-GaN kwi-SiC Epitaxy, okwenza kube yinto ebalulekileyo kubavelisi abafuna iziphumo eziphezulu. Ukongezelela, isebenza ngaphandle komthungo kunye ne-PSS Etching Carrier, i-ICP Etching Carrier, kunye neenkqubo ze-RTP Carrier, ukuphucula inkqubo yokusebenza kakuhle kunye nesivuno. I-susceptor nayo ifanelekile kwizicelo ze-LED Epitaxial Susceptor kunye nezinye iinkqubo eziphambili zokuvelisa i-semiconductor.

Ngoyilo lwayo oluguquguqukayo, i-semicera's MOCVD susceptor ingatshintshwa ukuze isetyenziswe kwi-Pancake Susceptors kunye ne-Barrel Susceptors, enikezela ukuguquguquka kwiiseto ezahlukeneyo zokuvelisa. Ukuhlanganiswa kweeNdawo ze-Photovoltaic kwandisa ngakumbi ukusetyenziswa kwayo, okwenza kube yinto efanelekileyo kuzo zombini i-semiconductor kunye namashishini elanga. Esi sisombululo siphezulu sinikezela ukuzinza okuhle kakhulu kwe-thermal kunye nokuqina, ukuqinisekisa ukusebenza kakuhle kwexesha elide kwiinkqubo zokukhula kwe-epitaxial.