Ubomi beNkonzo ende yeSiC efakwe kwi-Graphite Carrier yeSolar Wafer

Inkcazelo emfutshane:

I-Silicon carbide luhlobo olutsha lweekeramics ezinexabiso eliphezulu lokusebenza kunye neempawu ezintle zezinto eziphathekayo. Ngenxa yeempawu ezinje ngokuqina okuphezulu kunye nokuqina, ukumelana nobushushu obuphezulu, ukuguquguquka okukhulu kwe-thermal kunye nokuxhathisa ukubola kweekhemikhali, iSilicon Carbide inokumelana nayo yonke imichiza ephakathi. Ke ngoko, i-SiC isetyenziswa kakhulu kwimigodi yeoli, kwimichiza, koomatshini kunye ne-airspace, nkqu amandla enyukliya kunye nomkhosi banemfuno zabo ezikhethekileyo kwi-SIC. Esinye isicelo esiqhelekileyo esinokusinika amakhonkco okutywina epompo, i-valve kunye nezixhobo zokukhusela njl.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Iingenelo

Ukumelana ne-oxidation yobushushu obuphezulu
Uxhathiso olugqwesileyo lweCorrosion
Ukuxhathisa okulungileyo kweAbrasion
I-coefficient ephezulu yokushisa ukushisa
Ukuzithambisa, ukuxinana okuphantsi
Ukuqina okuphezulu
Uyilo olulungiselelweyo.

I-HGF (2)
I-HGF (1)

Usetyenziso

-Indawo ekwaziyo ukumelana nokunxiba: ibhulorho, ipleyiti, umbhobho wesanti, umgca wenkanyamba, umphanda wokusila, njl.
-Umgangatho wobushushu obuphezulu: i-siC Slab, iTube yokuCima iFurnace, iTube eRadiant, i-crucible, i-Heating Element, i-Roller, i-Beam, i-Heat Exchanger, i-Cold Air Pipe, i-Burner Nozzle, i-Thermocouple Protection Tube, isikhephe se-SiC, i-Kiln car Structure, i-Setter, njl.
-I-Silicon Carbide Semiconductor: Isikhephe se-SiC wafer, i-sic chuck, i-sic paddle, i-sic cassette, i-sic diffusion ityhubhu, i-wafer fork, ipleyiti yokufunxa, isikhokelo, njl.
-I-Silicon Carbide Seal Field: zonke iintlobo zeringi yokutywina, ukuthwala, i-bushing, njl.
-I-Photovoltaic Field: I-Cantilever Paddle, i-Barrel yokugaya, i-Silicon Carbide Roller, njl.
-Indawo yebhetri yeLithium

I-WAFER (1)

I-WAFER (2)

IiPropati zoBume beSiC

Ipropati Ixabiso Indlela
Ukuxinana 3.21 g/cc I-Sink-float kunye ne-dimension
Ubushushu obuthile 0.66 J/g °K Isibane se-laser pulsed
Amandla e-Flexural 450 MPa560 MPa I-4 point bend, i-RT4 point bend, i-1300 °
Ukuqina kokwaphuka 2.94 MPa m1/2 I-Microindentation
Ukuqina 2800 Vicker, 500g umthwalo
Elastic ModulusOlutsha's Modulus 450 GPA430 GPA 4 pt ukugoba, RT4 pt ukugoba, 1300 °C
Ubungakanani beenkozo 2 – 10 µm I-SEM

Iipropati zoThermal zeSiC

I-Thermal Conductivity 250 W/m °K Indlela yeLaser flash, RT
Ukwandiswa kweThermal (CTE) 4.5 x 10-6 °K Ubushushu begumbi ukuya kuma-950 °C, i-silica dilatometer

IiParameters zobuGcisa

Into Iyunithi Idatha
I-RBSiC(SiSiC) NBSiC I-SSiC RSiC OSiC
Umxholo weSiC % 85 75 99 99.9 ≥99
Umxholo wesilicon wasimahla % 15 0 0 0 0
Ubushushu benkonzo enkulu 1380 1450 1650 1620 1400
Ukuxinana g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2,75 2.75-2.85
I-porosity evulekile % 0 13-15 0 15-18 7-8
Amandla okugoba 20℃ Mpa 250 160 380 100 /
Amandla okugoba 1200℃ Mpa 280 180 400 120 /
Imodyuli ye-elasticity 20℃ Gpa 330 580 420 240 /
Imodyuli ye-elasticity 1200℃ Gpa 300 / / 200 /
Thermal conductivity 1200℃ W/mK 45 19.6 100-120 36.6 /
I-Coefficient yokwandiswa kwe-thermal K-1X10-6 4.5 4.7 4.1 4.69 /
HV Kg/mm2 2115 / 2800 / /

I-CVD ye-silicon carbide yokwambathisa kumphezulu wangaphandle we-silicon carbide iimveliso ze-ceramic ezinokufikelela kubunyulu obungaphezulu kwe-99.9999% ukuhlangabezana neemfuno zabathengi kwishishini le-semiconductor.

Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
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