I-Isostatic PECVD yeGraphite Boat

Isostatic PECVD Graphite Boat Featured Image

Inkcazelo emfutshane:

Isikhephe se-Isostatic PECVD segraphite sisetyenziswa ngokubanzi kwiikhonkco ezahlukeneyo zokwenziwa kwe-semiconductor, ezifana ne-polysilicon film deposition, i-oxide yefilimu ye-oxide, i-nitride film deposition, njl. Ukusebenza kwayo okugqwesileyo kuyenza ibe yinto efanelekileyo yokuthwala i-wafer kwinkqubo ye-PECVD.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-SEMICERA isostatic PECVD graphite boat yi-high-purity, high-density high-density graphite product eyenzelwe ukuxhasa iwafer kwi-PECVD (i-plasma ephuculweyo yokubeka umphunga wekhemikhali) inkqubo. I-SEMICERA isebenzisa itekhnoloji ecinezelayo ye-isostatic ephambili yokuqinisekisa ukuba isikhephe segraphite sinokuxhathisa ubushushu obuphezulu, ukumelana nokubola, ukuzinza komda kunye nokuhamba kakuhle kwe-thermal, into eyimfuneko kakhulu kwinkqubo yokwenziwa kwe-semiconductor.

I-SEMICERA isostatic PECVD isikhephe segraphite sinezibonelelo ezilandelayo:

▪ Ukucoceka okuphezulu: Isixhobo segraphite sicoceke kakhulu kunye nesiqulatho esisezantsi sokungcola ukuze kuthintelwe ukungcoliswa komphezulu we-wafer.

▪ Uxinaniso oluphezulu: Uxinaniso oluphezulu, ukomelela okuphezulu koomatshini, kunokumelana nobushushu obuphezulu kunye nemekobume yevacuum ephezulu.

▪ Uzinzo oluhle lomgangatho: Utshintsho oluncinci lwe-dimensional kwiqondo lokushisa eliphezulu ukuqinisekisa ukuzinza kwenkqubo.

▪ I-Thermal conductivity egqwesileyo: Ukudlulisa ubushushu ngokufanelekileyo ukuthintela ukugqithiswa kwe-wafer.

▪ Iyakwazi ukuxhathisa umhlwa: Iyakwazi ukuxhathisa ukhukuliseko ngeegesi ezonakalisayo ezahlukahlukeneyo kunye neplasma.

Ipharamitha yokusebenza	semicera	SGL R6510	Ipharamitha yokusebenza
Ubuninzi bobuninzi (g/cm3)	1.91	1.83	1.85
Amandla okugoba (MPa)	63	60	49
Amandla acinezelayo (MPa)	135	130	103
Ukuqina konxweme (HS)	70	64	60
I-Coefficient yokwandiswa kwe-thermal (10-6/K)	85	105	130
I-Coefficient yokwandiswa kwe-thermal (10-6/K)	5.85	4.2	5.0
Ukuxhathisa (μΩm)	11-13	13	10

Izinto ezilungileyo zokusikhetha:
▪ Ukukhethwa kwezinto eziphathekayo: Izinto zegraphite ezicocekileyo zisetyenziselwa ukuqinisekisa umgangatho wemveliso.
▪ Iteknoloji yokucubungula: I-Isostatic pressing isetyenziselwa ukuqinisekisa ubuninzi bemveliso kunye nokufana.
▪ Ukulungelelanisa ubungakanani: Izikhephe zegraphite zobukhulu obuhlukeneyo kunye neemilo zinokwenziwa ngokweemfuno zabathengi.
▪ Unyango oluphezulu: Iindlela ezahlukeneyo zonyango ezisemgangathweni zinikezelwa, ezifana nokugquma i-silicon carbide, i-boron nitride, njl., ukuhlangabezana neemfuno zenkqubo ezahlukeneyo.