Ucoceko oluPhezulu oluQinisekileyo lweCVD Silicon Carbide SiC Bulk

Inkcazelo emfutshane:

I-Semicera yaziwa njengenye yobuchwephesha bobuGcisa obuPhezulu obuqinileyo begraphite esekwe kwi-CVD silicon carbide abavelisi kunye nababoneleli baseTshayina. Ukucoceka okuphakamileyo okuqinileyo okusekwe kwi-CVD yesilicon carbide bulk ayiqhubelanga phambili kuphela kodwa yomelele. Ngaphandle koko, sinomzi-mveliso wethu kwaye sikwaxhasa ukupakishwa okuninzi. Yiza uyithenge!

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Iindawo eziqinileyo ze-CVD SILICON CARBIDE zibonwa njengolona khetho luphambili lwe-RTP/EPI amakhonkco kunye neziseko kunye neengxenye ze-plasmaetch cavity ezisebenza kwinkqubo ephezulu efunekayo ubushushu bokusebenza (>1500℃), iimfuno zococeko ziphezulu kakhulu (> 99.9995%) kwaye ukusebenza kuhle ngakumbi xa ukuxhathisa imichiza kuphezulu kakhulu. Ezi zixhobo aziqukethe izigaba zesibini kwi-grain edge, ngoko ke amacandelo abo avelisa amaqhekeza amancinci kunezinye izinto. Ukongezelela, la macandelo anokucocwa ngokusebenzisa i-HF / HCl eshushu kunye nokuthotywa okuncinci, okubangelwa amaqhekeza amancinci kunye nobomi obude benkonzo.