I-Fused Quartz Pedestal esuka kwi-Semicera yenziwe ngobuchule ukubonelela ngenkxaso engahambelaniyo kunye nokuzinza kwizicelo ezahlukeneyo zobushushu obuphezulu. Yenziwe ukusukaiquartz ecocekileyo ephezulu, le pedestal ifanelekile kwiinkqubo ze-semiconductor, kuquka ukusabalalisaiqhekeza lesonkainkqubo kunye neLPCVD. Ukuxhathisa kwayo okukhethekileyo kwe-thermal kunye nokuqina kweekhemikhali kuyenza ibe lolona khetho lufanelekileyo kwiindawo ezifunayo.
Kwi-Semicera, sibeka phambili umgangatho, siqinisekisa ukuba iimveliso zethu zeglasi ze-quartz ezidibeneyo zihlangabezana nemigangatho ephezulu. Isiseko se-quartz esidityanisiweyo asiphuculi ukusebenza kuphela kodwa sikwabonelela ngesisombululo esinexabiso eliphantsi kwabo bafuna iinketho zeglasi ezithembekileyo ze-silica. Nokuba uyayifuna usetyenziso lwequartz yesemiconductor okanye olunye usetyenziso olukhethekileyo, i-pedestal yethu igqame ngokuhlala kwayo kunye nokuchaneka kwayo.
Izinto eziluncedo kwi-Fused Quartz Material
1.Ukumelana nobushushu obuphezulu
I-Fused Quartz Pedestal iqhayisa kwindawo yokuthamba emalunga ne-1730°C, iyivumela ukuba imelane nokusetyenziswa ixesha elide kumaqondo obushushu asuka kwi-1100°C ukuya kwi-1250°C. Ngaphaya koko, inokunyamezela ukuchatshazelwa kwexesha elifutshane kumaqondo obushushu afikelela kuma-1450°C.
2.Ukunyangwa kokuNgxwala
I-Fused Quartz Pedestal ayisebenzi ngokwekhemikhali kwiiasidi ezininzi, ngaphandle kwe-hydrofluoric acid. Ukuxhathisa kwayo ngeasidi ukodlula oko kweceramic ngamaxesha angama-30 kunye nentsimbi engatyiwayo ngamaxesha angama-150. Kwiqondo lokushisa eliphakamileyo, akukho nanye into enokuthi ihambelane nokuzinza kweekhemikhali ze-quartz edibeneyo, okwenza kube lukhetho olufanelekileyo kwiimeko zemichiza enzima.
3. Ukuzinza kweThermal
Enye yeempawu ezibalaseleyo zeFused Quartz Pedestal kukwandiswa kwayo okuncinci kwe-thermal coefficient. Le propati ivumela ukuba imelane nokutshintsha kweqondo lokushisa elibi ngaphandle kokuqhekeka. Ngokomzekelo, inokufudumeza ngokukhawuleza kwi-1100 ° C kwaye emva koko ifakwe emanzini kwindawo yokushisa ngaphandle kokugcina umonakalo-impawu ebalulekileyo kwiinkqubo zokuvelisa uxinzelelo oluphezulu.