Ubuninzi beCVD SiC Ring

Inkcazelo emfutshane:

Amakhonkco amaninzi e-CVD SiC asebenzisa igesi ye-silicon (efana ne-silicon hydride) kunye negesi ye-carbon source (efana ne-methane) njengezinto eziluhlaza, ezisabela kubushushu obuphezulu ukuze zifake izinto ezinkulu ze-SiC kwi-substrate okanye i-mold. Le nkqubo ivumela i-SiC ukuba ifakwe ngokufanayo kwindawo enkulu, yenze isakhiwo esiqinileyo nesihambelanayo sendandatho.

 


Iinkcukacha zeMveliso

Iithegi zeMveliso

Kutheni iSilicon Carbide Etching Ring?

RTPamakhonkco e-CVD SiCzisetyenziswa kakhulu kwiindawo zoshishino kunye nezenzululwazi kumaqondo obushushu aphezulu kunye neendawo ezingcolisayo. Idlala indima ebalulekileyo kwimveliso ye-semiconductor, i-optoelectronics, umatshini ochanekileyo kunye noshishino lweekhemikhali. Usetyenziso oluthile lubandakanya:

1. Ukwenziwa kweSemiconductor:RTP CVD SiC amakhonkcoingasetyenziselwa ukufudumeza kunye nokupholisa izixhobo ze-semiconductor, ukubonelela ngolawulo oluzinzileyo lokushisa kunye nokuqinisekisa ukuchaneka kunye nokuhambelana kwenkqubo.

2. I-Optoelectronics: Ngenxa ye-conductivity egqwesileyo ye-thermal kunye nokumelana nokushisa okuphezulu, i-RTPamakhonkco e-CVD SiCinokusetyenziswa njengenkxaso kunye nezixhobo zokulahla ubushushu kwiilaser, izixhobo zonxibelelwano zefiber optic kunye namacandelo optical.

3. Umatshini ochanekileyo: I-RTP CVD SiC rings ingasetyenziselwa izixhobo ezichanekileyo kunye nezixhobo kwiqondo lokushisa eliphezulu kunye neendawo ezinobungozi, ezifana nezithando zokushisa eziphezulu, izixhobo ze-vacuum kunye neekhemikhali ze-reactors.

4. Ishishini leMichiza: Ngenxa yokumelana nokubola kunye nokuzinza kweekhemikhali, i-RTP CVD i-SiC rings ingasetyenziselwa kwiibhokisi, imibhobho kunye ne-reactors kwi-chemical reactions kunye neenkqubo ze-catalytic.

 

Inkqubo ye-Epi

Inkqubo ye-Epi

Inkqubo ye-RTP

Inkqubo ye-RTP

Inkqubo yeCVD

Inkqubo yeCVD

Ukusebenza kwemveliso:

1. Dibana nenkqubo engaphantsi kwe-28nm

2. Super umhlwa ukumelana

3. Ukusebenza okucocekileyo kakhulu

4. Ubunzima obukhulu

5. Ukuxinana okuphezulu

6. Ukumelana nobushushu obuphezulu

7. Ukunxiba ukuxhathisa

izixhobo zokuvelisa i-quartz 4

Ukusetyenziswa kwemveliso:

Izinto ze-silicon ze-carbide zineempawu zobunzima obuphezulu, ukuxhatshazwa kokugqoka, ukuxhathisa kwe-corrosion kunye nokuzinza okuphezulu kweqondo lokushisa. Iimveliso ezinomsebenzi obalaseleyo obanzi zisetyenziswa ngokubanzi kwi-etching eyomileyo kunye neenkqubo ze-TF / Diffusion.

Ukusebenza kwemveliso:

1. Dibana nenkqubo engaphantsi kwe-28nm

2. Super umhlwa ukumelana

3. Ukusebenza okucocekileyo kakhulu

4. Ubunzima obukhulu

5. Ukuxinana okuphezulu

6. Ukumelana nobushushu obuphezulu

7. Ukunxiba ukuxhathisa

微信截图_20241018182920
微信截图_20241018182909

Uphuhliso lwenkqubo edibeneyo:

Graphite +Sic Coating

Solide CvD sic

Sintered SiC+CVD

I-SicSintered SiC

Uphuhliso lweentlobo ezininzi zeemveliso:

Ring

Itheyibhile

Umxhasi

Intloko yeshawari

Semicera Indawo yokusebenzela
Indawo yokusebenza yeSemicera 2
Semicera Ware House
Umatshini wezixhobo
Ukucutshungulwa kwe-CNN, ukucocwa kweekhemikhali, ukugquma kwe-CVD
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