Alumina Ceramic Vacuum Chuck

Inkcazelo emfutshane:

I-Semicera's Alumina Ceramic Vacuum Chuck yi-vacuum chuck esebenza kakhulu eyenzelwe ukuveliswa kwe-semiconductor, ebonelela ngamandla okubamba okugqwesileyo kunye nokuzinza kwe-thermal. Yenziwe ngezinto eziphezulu ze-aluminium oxide (Al2O3), le chuck ye-vacuum ifanelekile ngokukodwa kwi-Silicon Nitride (Si3N4) kunye ne-Silicon Carbide (SiC) processing, ukuqinisekisa ukuthembeka kunye nokuchaneka phantsi kweemeko ezahlukeneyo zenkqubo.


Iinkcukacha zeMveliso

Iithegi zeMveliso

I-Semicera iyaziqhenya ngokuzisa i-Alumina Ceramic Vacuum Chuck yayo yamva nje, eyenzelwe ukuhlangabezana neemfuno zokwenza i-semiconductor yanamhlanje. Yenziwe ngeprimiyamuialuminiyam oxide (Al2O3)impahla, le vacuum chuck inozinzo obalaseleyo thermal kunye nokumelana umhlwa, ukuqinisekisa ukusebenza okuthembekileyo naphantsi kweemeko zokusebenza kakhulu. I-vacuum clamping force yayo egqwesileyo yenza umsebenzi osebenzayo kunye nochanekileyo xa kusetyenzwa izixhobo ezifanai-silicon nitride (Si3N4)kwayei-silicon carbide (SiC).

IiSemicera'sAlumina Ceramic Vacuum Chuckyenzelwe ngokuchanekileyo ukwenza kakuhle kwiintlobo ngeentlobo zezicelo zokusetyenzwa kwe-semiconductor. Nokuba ikwi-R&D okanye imveliso yobuninzi, le chuck yevacuum inokufezekisa i-uniform clamping effect, inciphise ngokufanelekileyo ilahleko yezinto, ngelixa iphucula ukusebenza kakuhle kwemveliso. I-clamping force yayo ezinzileyo kunye ne-thermal conductivity efanelekileyo iqinisekisa ukuba inyathelo ngalinye lokucubungula linokufikelela iziphumo ezilungileyo.

Ukongeza, okuAlumina Ceramic Vacuum Chuckiphinde igqwese ngokuhambelana kwaye ikwazi ukudibanisa ngaphandle komthungo kunye neentlobo zezixhobo zokulungisa i-semiconductor ukuhlangabezana neemfuno zemigca yokuvelisa eyahlukeneyo. Iqela loyilo leSemicera ligxile ekwandiseni zonke iinkcukacha ukuqinisekisa ukuba iimveliso zalo zihlala ziphambili kwintengiso.

I-Semicera izimisele ukubonelela abathengi ngezisombululo zokwenziwa kwe-semiconductor ephezulu yokusebenza. Xa ukhetha iSemicera'sAlumina Ceramic Vacuum Chuck, uya kufumana umgangatho ophezulu wokusebenza kunye nokuthembeka, kukunceda ufezekise iinkqubo ezisebenzayo zokuvelisa kunye nomgangatho ongcono wemveliso. Nokuba zeziphi na iimfuno zakho, iSemicera iya kukunika inkxaso eyomeleleyo kunye nenkonzo.

Al2O3 Vacuum Chuck
Alumina Ceramic Vacuum Chuck
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