AlN heater

Inkcazelo emfutshane:

I-AlN Heater yi-Semicera isisombululo sokufudumeza esiphezulu esilungiselelwe ukusetyenziswa ngokuchanekileyo kumashishini afana ne-semiconductors kunye ne-electronics. Yenziwe nge-aluminiyam nitride ceramic, inikezela nge-thermal conductivity egqwesileyo kunye nokugqunyelelwa kombane, iyenza ilungele iinkqubo ezifuna ulawulo oluchanekileyo lobushushu. I-Semicera iqinisekisa ukuba yonke i-AlN Heater yenzelwe ukuhambisa ukusebenza okuthembekileyo kwiindawo eziphezulu zokushisa, inika ukusebenza kakuhle kunye nokuqina kwizicelo ezibalulekileyo.

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-AlN Heater nge-semicera sisisombululo sokufudumeza esiphezulu esenziwe kwi-aluminium nitride ceramic, eyenzelwe usetyenziso oluphezulu kumashishini afana ne-semiconductors, iinkqubo ze-vacuum, kunye nokunye. Isifudumezi esikhethekileyo sokwenziwa kobushushu kunye nokugqunyelelwa kombane kuyenza ilungele ukufudumeza okuchanekileyo kwiimeko ezibango ezifana nokusetyenzwa kwewafer, ivacuum evaporators, kunye noomatshini bokutshiza.

Kwi-semicera, siyazingca ngokuzisa iimveliso eziphezulu ezihlangabezana neemfuno zeshishini, kwaye i-AlN Heater ayinjalo. Yenziwe kwi-aluminiyam nitride (i-AlN), le heater inika ukumelana nobushushu obugqwesileyo, ukwandiswa kwe-thermal ephantsi, kunye nokukwazi ukumelana nobushushu obugqithisileyo ngaphandle kokubeka esichengeni ukusebenza. Ukusasazwa kwayo ngokufanelekileyo kobushushu kuyenza ifaneleke kwiinkqubo ezibalulekileyo ezifana ne-chemical vapor deposition (CVD) kunye nezinye izicelo zefilimu encinci.

Ukongeza, i-AlN Heater ilungele ukudityaniswa kwizifudumezi ze-wafer kunye ne-vacuum evaporators, iyenza ibe sisisombululo esiguquguqukayo sabavelisi abaxhomekeke kwizinto ezingaguqukiyo, ezikumgangatho ophezulu wokufudumeza. Ngomatshini we-aluminium nitride kunye ne-nitride echanekileyo yokwakhiwa kwe-aluminium, i-heater yakhelwe ukuthembeka kwexesha elide kunye nokulawula ukufudumeza ngokuchanekileyo.

Ukuba ujonge isisombululo se-Aluminiyam ye-Aluminiyam ye-Aluminiyam egqwesileyo kuzo zombini ukuqina kunye nokusebenza kakuhle, i-semicera ibonelela ngokhetho oluthembekileyo kwi-AlN Heater. Esi sifudumezi se-ceramic esiphezulu sixhasa itekhnoloji yokusika kwiinkqubo ze-CVD, i-sputtering, kunye nezinye izicelo ze-semiconductor, inceda ukugcina inkqubo yokuthembeka kwiindawo eziphezulu zokushisa.