Al2O3 Vacuum Chuck

Inkcazelo emfutshane:

I-Semicera's Al2O3 Vacuum Chuck yenzelwe iinkqubo ezisebenzayo zokwenziwa kwe-semiconductor kwaye ibonelela ngokusebenza okugqwesileyo kwe-vacuum clamping. Imveliso isebenzisa umgangatho ophezulu we-aluminium oxide (Al2O3) izinto zokuqinisekisa ukuzinza nokuthembeka phantsi kweemeko ezahlukeneyo zenkqubo, ngokukodwa i-Silicon Nitride (Si3N4) kunye neSilicon Carbide (SiC) processing.


Iinkcukacha zeMveliso

Iithegi zeMveliso

IiSemicera'sAl2O3 Vacuum Chuckilungele ukwenziwa kwe-semiconductor, ngakumbi kwizicelo ezifuna ukuchaneka okuphezulu kunye nokuthembeka. Yenziwe ngekhwalithi ephezulu ye-aluminium oxide (i-Al2O3), le chuck ye-vacuum inozinzo oluhle kakhulu lwe-thermal kunye nokumelana nokubola kweekhemikhali ukuhlangabezana neemfuno zeendawo zokucubungula ezinzima. Ngoyilo oluphuculweyo, iSemicera iqinisekisa ukuba yayoAl2O3 Vacuum Chuckinokugcina amandla agqwesileyo okubamba phantsi kweemeko ezahlukeneyo zenkqubo, iqinisekisa ukusebenza kakuhle kunye nokhuseleko ngexesha lokusetyenzwa kwe-wafer.

Xa kusetyenzwai-silicon nitride (Si3N4)kwayei-silicon carbide (SiC)imathiriyeli, i-Semicera's Al2O3 Vacuum Chuck iphucula ngokufanelekileyo ukufana kunye nokuzinza kwe-vacuum clamping ngoyilo lwayo olulodwa lolwakhiwo. Eli nqaku aligcini nje ukunciphisa ilahleko yezinto eziphathekayo, kodwa liphucula kakhulu ukusebenza kakuhle kwemveliso, ukuqinisekisa ukuba inyathelo ngalinye lokucwangcisa linokufikelela iziphumo ezilungileyo.

Ukongeza, iSemicera'sAl2O3 Vacuum Chuckigqwesile ehambelanayo kwaye inokunxibelelana ngokungenamthungo kunye nezixhobo ezahlukeneyo zokusetyenzwa kwe-semiconductor ukuhlangabezana neemfuno zemigca eyahlukeneyo yokuvelisa. Nokuba kukwinqanaba le-R&D okanye kwimveliso yobuninzi, le chuck yevacuum inokubonelela ngenkxaso ethembekileyo ukunceda abathengi baphume phambili kwimarike yokhuphiswano.

I-Semicera isoloko izibophelele ekuboneleleni abathengi abanezisombululo eziphezulu zokuvelisa i-semiconductor, kwaye ukuqaliswa kwe-Al2O3 Vacuum Chuck kukubonakalisa ukutsha kwayo kwezobuchwepheshe kunye nokuzibophezela komgangatho. Ngokukhetha iimveliso zeSemicera, abathengi baya kuba nakho ukufumana ukusebenza okugqwesileyo kunye nokuthembeka, ngaloo ndlela befezekisa iinkqubo ezisebenzayo zokuvelisa kunye nemveliso ekumgangatho ophezulu.

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