I-silicon ye-carbide ye-ceramic chucks

Inkcazelo emfutshane:

I-WeiTai Energy Technology Co., Ltd. ngumboneleli ohamba phambili weeseramics zesemiconductor eziphucukileyo kwaye nguye kuphela umenzi eTshayina onokunika ngaxeshanye ukucoceka okuphezulu kwesilicon carbide ceramic (ingakumbiRecrystallized SiC) kunye neCVD SiC coating.Ukongeza, inkampani yethu izibophelele kumasimi e-ceramic afana ne-alumina, i-aluminium nitride, i-zirconia, kunye ne-silicon nitride, njl.


Iinkcukacha zeMveliso

Iithegi zeMveliso

Ipleyiti ye-SiC luhlobo lwe-0 porosity exineneyo yekeramics yomzimba, esekwe kwi-SiC kwaye ifakwe kwi-2250 ℃.Umxholo we-SiC ungaphezulu kwe-99.6%, amandla okugoba angaphezulu kwe-410mpa kunye ne-thermal conductivity yi-140W / MK kuphela kwezinto ze-ceramic ezixhathisayo kwi-HF, i-H2SO4 kunye nezinye i-asidi eqinile.

Izinto ezilungileyo ze-silicon carbide ceramics:

I-1, i-coefficient yokwandiswa kwe-thermal incinci, isondele kakhulu kwi-silicon;

2, ukuxhathisa ukunxiba okugqwesileyo, ubulukhuni okwesibini kuphela kwidayimane;

I-3, i-thermal conductivity egqwesileyo, ukumelana nobushushu obuphezulu kunye nokutshatyalaliswa kobushushu ngokukhawuleza;

I-silicon ye-carbide chuck3

Iiparamitha zobuGcisa

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